Ellipsometry and transport studies of thin-film metal nitrides

Thin Solid Films

Volumn 332, Issue 1-2, 1998, Pages 25-29

  Humlicek J ^a   Nebojsa, A ^a   Hora, J ^a   Strasky M ^b   Spousta, J ^b   Sikola T ^b  

^a MASARYK UNIVERSITY   (Czech Republic)

^b BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

Ellipsometry; Thin film metal nitrides; Transport

Indexed keywords

CHARGE CARRIERS; ELECTRIC CONDUCTIVITY MEASUREMENT; ELLIPSOMETRY; FILM GROWTH; INFRARED SPECTROSCOPY; ION BEAMS; POLARIZATION; SPUTTER DEPOSITION; THIN FILMS; TITANIUM NITRIDE; ULTRAVIOLET SPECTROSCOPY;

ION BEAM ASSISTED DEPOSITION; THIN FILM METAL NITRIDES;

CONDUCTIVE FILMS;

EID: 0032476320     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01014-1     Document Type: Article

References (7)

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4. T. Šikola, et al., Thin Solid Films (1998) this volume.
5. D.F. Edwards, Handbook of Optical Constants of Solids, in: E.D. Palik (Ed.), Academic Press, Orlando, 1985 p. 547.
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7. J. Humlíček, Thin Solid Films (1998) in press.