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Volumn 80, Issue 3, 2003, Pages 577-580

Effects of oxygen on the growth of Ni induced lateral crystallization of amorphous silicon films

Author keywords

Amorphous silicon; Metal induced lateral crystallization (MILC); Nickel and nickel oxide; Oxygen; Polycrystalline silicon

Indexed keywords

ANNEALING; CRYSTAL GROWTH; CRYSTALLIZATION; FILMS; NICKEL; NUCLEATION; OXYGEN; POLYSILICON;

EID: 0037881949     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(03)00108-1     Document Type: Article
Times cited : (4)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.