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Volumn 80, Issue 3, 2003, Pages 577-580
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Effects of oxygen on the growth of Ni induced lateral crystallization of amorphous silicon films
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Author keywords
Amorphous silicon; Metal induced lateral crystallization (MILC); Nickel and nickel oxide; Oxygen; Polycrystalline silicon
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Indexed keywords
ANNEALING;
CRYSTAL GROWTH;
CRYSTALLIZATION;
FILMS;
NICKEL;
NUCLEATION;
OXYGEN;
POLYSILICON;
METAL INDUCED LATERAL CRYSTALLIZATION (MILC);
AMORPHOUS SILICON;
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EID: 0037881949
PISSN: 02540584
EISSN: None
Source Type: Journal
DOI: 10.1016/S0254-0584(03)00108-1 Document Type: Article |
Times cited : (4)
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References (12)
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