Effect of stress and density on the electrical and physical properties of MgO protecting layer for alternating current-plasma display panels

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 1192-1196

  Lee, Mi Jung ^a   Park, Sun Young ^a   Kim, Soo Gil ^a   Kim, Hyeong Joon ^a   Moon, Sung Hwan ^a,b   Kim, Jong Kuk ^c  

^a Seoul National University   (South Korea)

^b Samsung SDI   (South Korea)

^c Korea Institute of Machine and Materials   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

LASER SCANNING METHOD; STRESS STATES; SUBSTRATE TEMPERATURES;

ATOMIC FORCE MICROSCOPY; COMPRESSIVE STRESS; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; ELECTRIC POTENTIAL; ELECTRON BEAMS; EVAPORATION; MAGNESIA; MICROSTRUCTURE; PLASMA DISPLAY DEVICES; SCANNING ELECTRON MICROSCOPY; STRESS ANALYSIS; SURFACE ROUGHNESS; THERMAL STRESS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

THIN FILMS;

EID: 31044446716     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1924472     Document Type: Conference Paper

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