Effect of plasma cleanings on the characteristics of MgO layer for plasma display panel

Surface and Coatings Technology

Volumn 177-178, Issue , 2004, Pages 705-710

  Hwang, H K ^a   Jeong, C H ^a   Lee, Y J ^a   Ko, Y W ^b   Yeom, G Y ^a  

^a Sungkyunkwan University   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Atmospheric pressure plasma; Cleaning; Low pressure inductively couple plasma; MgO; Outgassing; PDP

Indexed keywords

ATMOSPHERIC PRESSURE; MAGNESIUM COMPOUNDS; MASS SPECTROMETERS; PLASMA DISPLAY DEVICES; SURFACE ROUGHNESS;

INDUCTIVELY COUPLED DEVICES (ICD); PLASMA CLEANINGS;

PLASMAS;

PLASMA TREATMENT;

EID: 1342290026     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.08.010     Document Type: Article

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