Evaluation of depth resolution with time-of-flight medium energy backscattering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 243, Issue 2, 2006, Pages 377-384

  Geil, Robert D ^a   Rogers, Bridget R ^a   Weller, Robert A ^a   Hilton, Jessica L ^b  

^a VANDERBILT UNIVERSITY   (United States)

^b University of Minnesota   (United States)

Author keywords

Depth resolution; Energy resolution; Medium energy scattering; Multiple scattering; Thin film

Indexed keywords

DETECTORS; ENERGY ABSORPTION; OPTICAL RESOLVING POWER; OPTIMIZATION; THIN FILMS;

DEPTH RESOLUTION; ENERGY RESOLUTION; MEDIUM ENERGY SCATTERING; MULTIPLE SCATTERING;

BACKSCATTERING;

EID: 30844459047     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.184     Document Type: Article

References (22)

1. R.D. Geil, B.R. Rogers, R.A. Weller, and Z. Song J. Vac. Sci. Technol. A 22 2004 1129
2. E. Rauhala J.R. Tesmer M.A. Nastasi Handbook of Modern Ion Beam Materials Analysis 1995 Mater. Res. Soc. Pittsburg 385
3. M.S. Kim, Y.D. Bue, and H.I. Bak Nucl. Instr. and Meth. B 108 1996 139
4. D.J. O'Connor, and T. Chunyu Nucl. Instr. and Meth. B 36 1989 178
5. E. Szilagyi Nucl. Instr. and Meth. B 161-163 2000 37
6. J.S. Williams Nucl. Instr. and Meth. 126 1975 205
7. J.S. Williams, and W. Moller Nucl. Instr. and Meth. 157 1978 213
8. R. Grotzschel, C. Klein, and M. Mader Nucl. Instr. and Meth. B 219-220 2004 344
9. K. Kimura, S. Joumori, Y. Oota, K. Nakajima, and M. Suzuki Nucl. Instr. and Meth. B 219-220 2004 351
10. T. Gustafsson, H.C. Lu, B.W. Busch, W.H. Schulte, and E. Garfunkel Nucl. Instr. and Meth. B 183 2001 146
11. M.H. Mendenhall, and A.R. Weller Nucl. Instr. and Meth. B 40/41 1989 1239
12. S. Shimoda, and T. Kobayashi Nucl. Instr. and Meth. B 219-220 2004 573
13. K. McDonald, R.A. Weller, and V.K. Liechtenstein Nucl. Instr. and Meth. B 152 1999 171
14. R.A. Weller, K. McDonald, D. Pedersen, and J.A. Keenan Nucl. Instr. and Meth. B 118 1996 556
15. J.R. Tesmer, and M.A. Nastasi J.R. Tesmer Handbook of Modern Ion Beam Materials Analysis 1995 Mater. Res. Soc. Pittsburg
16. W.K. Chu, J.M. Mayer, and M.A. Nicolet Backscattering Spectrometry 1978 Academic Press New York
17. J.M. Harris, W.K. Chu, and M.A. Nicolet Thin Solid Films 19 1973 259
18. J.H. Arps, and R.A. Weller Nucl. Instr. and Meth. B 90 1994 547
19. R.A. Weller, J.H. Arps, D. Pedersen, and M.H. Mendenhall Nucl. Instr. and Meth. A 353 1994 579
20. R.A. Weller Nucl. Instr. and Meth. B 99 1995 491
21. E. Szilagyi, and F. Paszti Nucl. Instr. and Meth. B 85 1994 616
22. A.R. Knudson Nucl. Instr. and Meth. 168 1980 163