Development of three-dimensional medium-energy ion scattering spectroscopy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 573-577

  Shimoda, S ^a   Kobayashi, T ^a  

^a RIKEN   (Japan)

Author keywords

Blocking; Medium energy ion scattering; Position sensitive and time resolving detector; Structure analysis

Indexed keywords

AGGLOMERATION; CRYSTAL STRUCTURE; ELECTRIC POTENTIAL; ELECTROSTATICS; INTERFACES (MATERIALS); ION SOURCES; NANOSTRUCTURED MATERIALS; SCATTERING; SILICON; SPECTROMETERS;

BLOCKING; POSITION-SENSITIVE AND TIME-RESOLVING DETECTOR; STRUCTURE ANALYSIS; THREE-DIMENSIONAL MEDIUM-ENERGY ION SCATTERING SPECTROSCOPY (3D-MEIS);

ION BEAMS;

EID: 2442549487     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.122     Document Type: Conference Paper

References (7)

1. Kobayashi T., Dorenbos G., Shimoda S., Iwaki M., Aono M. Nucl. Instr. and Meth. B. 118:1996;584.
2. Kobayashi T., Shimoda S., Iwaki M., Aono M. RIKEN Rev. (12):1996;33.
3. Kobayashi T., McConville C.F., Dorenbos G., Iwaki M., Aono M. Appl. Phys. Lett. 74:1999;673.
4. Kobayashi T., McConville C.F., Nakamura J., Dorenbos G., Sone H., Katayama T., Aono M. Defect Diffus. Forum. 183-185:2000;207.
5. van der Veen J.F. Surf. Sci. Rep. 5:1985;199.
6. Rabalais J.W. Principles and Applications of Ion Scattering Spectrometry (Surface Chemical and Structural Analysis). 2003;John Wiley & Sons, New Jersey.
7. Ziegler J.F. The Stopping and Ranges of Ions in Matter. Vol. 4:1977;Pergamon, New York.