Determination of the optimum experimental conditions for enhanced depth resolution in RBS using He ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 108, Issue 1-2, 1996, Pages 139-146

  Kim, M S ^a   Bae, Y D ^a   Bak, H I ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038877340     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)00876-4     Document Type: Article

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