RBS with high depth resolution using small magnetic spectrometers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 344-350

  Grötzschel, Rainer ^a   Klein, Christoph ^a   Mäder, Michael ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

High resolution; Magnetic spectrometer; Rutherford backscattering spectrometry; Ultra thin layers

Indexed keywords

CHEMICAL ANALYSIS; EVAPORATORS; KINEMATICS; MAGNETS; MONOLAYERS; MULTILAYERS; PARTICLE ACCELERATORS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SPECTROMETERS; ULTRATHIN FILMS; X RAY DIFFRACTION ANALYSIS;

ELECTROSTATIC ANALYZERS; MAGNETIC SPECTROMETERS; RUTHERFORD CROSS SECTIONS;

RUTHERFORD BACKSCATTERING SPECTROSCOPY;

EID: 2442562233     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.080     Document Type: Conference Paper

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