Interfacial analysis using time-of-flight medium energy backscattering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1129-1133

  Geil, R D ^a   Rogers, B R ^a   Song, Zhe ^a   Weller, R A ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING SPECTRA; INTERFACIAL LAYERS; MATERIAL STRUCTURES; TIME-OF-FLIGHT MEDIUM ENERGY BACKSCATTERING (TOF-MEBS);

ADSORPTION; COMPUTER SIMULATION; CRYSTAL STRUCTURE; ELECTROMAGNETIC WAVE BACKSCATTERING; ELECTRON BEAMS; HYDROCARBONS; INTERFACES (MATERIALS); MATHEMATICAL MODELS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PULSE ANALYZING CIRCUITS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICA; SPECTRUM ANALYSIS; ULTRATHIN FILMS;

DIELECTRIC MATERIALS;

EID: 4444263282     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1738652     Document Type: Article

References (22)

1. R. A. Weller, Methods in Materials Research (Wiley, New York, 2000), Chap. 12.
2. I. J. R. Baumvol and C. Rolfs, Nucl. Instrum. Methods Phys. Res. B 99, 431 (1995).
3. W. H. Schulte, B. W. Busch, E. Garfunkel, T. Gustafsson, G. Schiwietz, and P. L. Grande, Nucl. Instrum. Methods Phys. Res. B 183, 16 (2001).
4. H. D. Carstanjen, Nucl. Instrum. Methods Phys. Res. B 136-138, 1183 (1998).
5. T. Gustafsson, H. C. Lu, B. W. Busch, W. H. Schulte, and E. Garfunkel, Nucl. Instrum. Methods Phys. Res. B 183, 146 (2001).
6. M. H. Mendenhall and R. A. Weller, Nucl. Instrum. Methods Phys. Res. B 59/60, 120 (1991).
7. W. K. Chu, J. M. Mayer, and M. A. Nicolet, Backscattering Spectrometry (Academic, New York, 1978).
8. K. McDonald, R. A. Weller, and V. K. Liechtenstein, Nucl. Instrum. Methods Phys. Res. B 152, 171 (1999).
9. M. H. Mendenhall and R. A. Weller, Nucl. Instrum. Methods Phys. Res. B 40/41, 1239 (1989).
10. K. Kimura and K. Nakajima, Appl. Surf. Sci. 216, 283 (2003).
11. R. A. Weller, in Applications of Accelerators in Research and Industry, edited by J. L. Duggan and I. L. Morgan (American Institute of Physics, New York, 1999), Chap. 5.
12. E. Rauhala, Handbook of Modern Ion Beam Analysis (Materials Research Society, Pittsburgh, 1995), Chap. 2, pp. 3-19 and pp. 385-410.
13. R. A. Weller, J. H. Arps, D. Pedersen, and M. H. Mendenhall, Nucl. Instrum. Methods Phys. Res. A 353, 579 (1994).
14. M. D. Groner, J. W. Elam, F. H. Fabreguette, and S. M. George, Thin Solid Films 413, 186 (2002).
15. T. M. Klein, D. Niu, W. S. Epling, W. Li, D. M. Maher, C. C. Hobbs, R. I. Hedge, I. J. R. Baumvol, and G. N. Parsons, Appl. Phys. Lett. 75, 4001 (1999).
16. W. Tsai et al., Microelectron. Eng. 65, 259 (2003).
17. G. Gutierrez and B. Johansson, Phys. Rev. B 65, 104202 (2002).
18. X. Wu, D. Landheer, M. J. Graham, H.-W. Chen, T.-Y. Huang, and T.-S. Chao, J. Cryst. Growth 250, 479 (2003).
19. K. Kukli, M. Ritala, T. Uustare, J. Aarik, K. Forsgren, T. Sajavaara, M. Leskela, and A. Harsta, Thin Solid Films 410, 53 (2002).
20. E. Steinbauer, P. Bauer, and J. P. Biersack, Nucl. Instrum. Methods Phys. Res. B 45, 171 (1990).
21. W. Eckstein and M. Mayer, Nucl. Instrum. Methods Phys. Res. B 153, 337 (1999).
22. J. Mayer, Nucl. Instrum. Methods Phys. Res. B 194, 177 (2002).