Interfacial interactions at Au/Si3N4/Si(111) and Ni/Si3N4/Si(111) structures with ultrathin nitride films

Applied Physics Letters

Volumn 84, Issue 24, 2004, Pages 5031-5033

  Aballe, L ^a   Gregoratti, L ^a   Barinov, A ^a   Kiskinova, M ^a   Clausen, T ^b   Gangodadhyay, S ^b   Falta, J ^b  

^a SINCROTRONE TRIESTE   (Italy)

^b UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; CRYSTAL STRUCTURE; DEGRADATION; DIELECTRIC MATERIALS; DIFFUSION; GOLD; INTERFACES (MATERIALS); NICKEL; PHOTOELECTRON SPECTROSCOPY; PHOTOEMISSION; SILICON NITRIDE; SYNCHROTRONS;

INTERFACIAL REACTIONS; ROOM TEMPERATURE; SCANNING PHOTOEMISSION MICROSCOPES (SPEM); SYNCHROTRON PHOTOEMISSION SPECTROMICROSCOPY;

ULTRATHIN FILMS;

EID: 3042733119     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1763636     Document Type: Article

References (18)

1. M. M. Moslehi and K. C. Saraswat, IEEE Trans. Electron Devices ED-32, 106 (1985).
2. B.-R. Zhang, Z. Yu, G. J. Collins, T. Hwang, and W. H. Richie, J. Vac. Sci. Technol. A 7, 176 (1989), and references therein.
3. T. Hori, Gate Dielectrics and MOS ULSIs (Springer, Berlin, 1997).
4. C. H. F. Peden, J. W. Rogers, N. D. Shinn, K. B. Kidd, and K. L. Tsang, Phys. Rev. B 47, 15622 (1993).
5. J. Stober, B. Eisenhut, G. Rangelov, and Th. Fauster, Surf. Sci. 321, 111 (1994).
6. E. Bauer, Y. Wei, T. Mueller, A. Pavlovska, and I. S. T. Tsong, Phys. Rev. B 51, 17891 (1995).
7. Th. Schmidt, T. Clausen, O. Brumke, S. Gangodadhyay, J. Falta, J. I. Flege, S. Heun, S. Bernsdorf, L. Gregoratti, and M. Kiskinova, Nucl. Instrum. Methods Phys. Res. B 200, 79 (2003), and references therein.
8. J. E. Kim and H. W. Yeom, Phys. Rev. B 67, 035304 (2003), and references therein.
9. L. P. Buchwalter, J. Adhes. Sci. Technol. 9, 97 (1995).
10. A. P. Li, L. D. Zhang, Y. X. Zhang, G. G. Qin, X. Wang, and X. W. Hu, Appl. Phys. Lett. 69, 4 (1996).
11. L. Quattropani, I. Maggio-Aprile, F. H. Niedermann, and Ø. Fisher, Phys. Rev. B 57, 6623 (1998).
12. M. Kiskinova, Surf. Rev. Lett. 7, 447 (2000).
13. A. Hiraki, Surf. Sci. Rep. 3, 357 (1984).
14. H. von Kanel, Mater. Sci. Rep. 8, 193 (1992).
15. M. Kiskinova, Surf. Interface Anal. 30, 464 (2000).
16. R. D. Gould and S. A. Awan, Thin Solid Films 398-399, 454 (2001).
17. S. Günther, A. Kolmakov, J. Kovac, M. Marsi, and M. Kiskinova, Phys. Rev. B 56, 5003 (1997).
18. L. Gregoratti, S. Günther, J. Kovac, M. Marsi, R. Phaneuf, and M. Kiskinova, Phys. Rev. B 59, 2018 (1999).