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Volumn 69, Issue 1, 1996, Pages 4-6
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Electroluminescence from Au/Si nitride film/Si with the film prepared by electron cyclotron resonance method
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
ELECTRIC FIELD EFFECTS;
ELECTROLUMINESCENCE;
ELECTRON CYCLOTRON RESONANCE;
ELECTRONS;
GOLD;
NITROGEN;
SILICON NITRIDE;
SILICON WAFERS;
X RAY PHOTOELECTRON SPECTROSCOPY;
FORWARD BIAS;
HOLES;
LUMINESCENCE CENTERS;
NITROLIZATION;
MIS DEVICES;
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EID: 0030197172
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.118115 Document Type: Article |
Times cited : (17)
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References (12)
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