Spectro-microscopy of ultra-thin SiN films on Si ( 1 1 1 )

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 200, Issue , 2003, Pages 79-84

  Schmidt, Th ^a   Clausen, T ^a   Gangopadhyay, S ^a   Falta, J ^a   Heun, S ^a   Gregoratti, L ^b   Barinov, A ^b   Kaulich, B ^b   Kiskinova, M ^b  

^a UNIVERSITY OF BREMEN   (Germany)

^b SINCROTRONE TRIESTE   (Italy)

Author keywords

ESCA; Photoemission microscopy; Thin film growth

Indexed keywords

ATTENUATION; COMPOSITION; FILM GROWTH; PHOTOEMISSION; SILICON NITRIDE; SPECTROSCOPIC ANALYSIS; STOICHIOMETRY; SURFACE ROUGHNESS;

PHOTOEMISSION MICROSCOPY;

ULTRATHIN FILMS;

EID: 0037244746     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01678-6     Document Type: Conference Paper

References (16)

1. Watanabe M., Suemasu T., Murakte S., Asada M. Appl. Phys. Lett. 62:1993;300.
2. Jiang X., van Dijken S., Parkin S.S.P. Appl. Phys. Lett. 80:2002;3364.
3. Ermolieff A., Bernard P., Marthon S., Camargo da Costa J. J. Appl. Phys. 60:1986;3162.
4. Tabe M., Yamamoto T. Surf. Sci. 376:1997;99.
5. Kubler L., Bischoff J.L., Bolmont D. Phys. Rev. B. 38:1988;13113.
6. Bulmont D., Bischoff J.L., Kutz F., Kubler L. Surf. Sci. 269/270:1992;924.
7. Xu W., Li B., Fujimoto T., Kojima I. Surf. Coat. Technol. 135:2001;274.
8. Casalis L., Jark W., Kiskinova M., Lonza D., Melpignano P., Morris D., Rosei R., Savoia A., Abrami A., Fava C., Furlan P., Pugliese R., Vivoda D., Sandrin G., Wei F.-Q. Rev. Sci. Instr. 66:1995;4870.
9. Kiskinova M., Marsi M., Di Fabrizio E., Gentili M. Surf. Rev. Lett. 6:1999;265.
10. Kiskinova M. Surf. Rev. Lett. 7:2000;447.
11. Bauer E., Wei Y., Müller T., Pavlovska A., Tsong I.S.T. Phys. Rev. B. 51:1995;17891.
12. Tanuma S., Powell C.J., Penn D.R. Surf. Interface Anal. 17:1991;911.
13. Tanuma S., Powell C.J., Penn D.R. Surf. Interface Anal. 17:1991;917.
14. Ahn H., Wu C.-L., Gwo S., Wei C.M., Chou Y.C. Phys. Rev. Lett. 86:2001;2818.
15. Th. Schmidt, T. Clausen, O. Brunke, S. Gangopadhyay, J. Falta, J.I. Flege, S. Heun, S. Bernstorff, L. Gregoratti, M. Kiskinova, in preparation.
16. Th. Schmidt, T. Clausen, S. Gangopadhyay, J. Falta, S. Heun, L. Gregoratti, M. Kiskinova, in preparation.