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Thin Solid Films

Volumn 398-399, Issue , 2001, Pages 454-459

DC conductivity in RF magnetron sputtered gold-silicon nitride-gold sandwich structures

(2) Gould, R D a Awan, S A a

a KEELE UNIVERSITY (United Kingdom)

Author keywords

Conductity; Electrical properties and measurements; Silicon nitride; Sputtering

Indexed keywords

CAPACITANCE; ELECTRIC CONDUCTIVITY; ELECTRODES; ELECTROFORMING; MAGNETRON SPUTTERING; NEGATIVE RESISTANCE; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; THIN FILMS;

SCHOTTKY BARRIERS;

DIELECTRIC FILMS;

EID: 17744409582 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01383-9 Document Type: Conference Paper

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.