Hardness of bulk single-crystal GaN and AlN

MRS Internet Journal of Nitride Semiconductor Research

Volumn 7, Issue , 2002, Pages

  Yonenaga, Ichiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; ELASTICITY; HARDNESS; OPTICAL SYSTEMS; PHOTODETECTORS; RESIDUAL STRESSES; SINGLE CRYSTALS; STIFFNESS; STRAIN; VAPOR PHASE EPITAXY; YIELD STRESS;

DEVICE PROCESSING; ELASTIC COEFFICIENTS; HYDRIDE VAPOR PHASE EPITAXY (HVPE); ROOM TEMPERATURE;

GALLIUM NITRIDE;

EID: 3042587522     PISSN: 10925783     EISSN: None     Source Type: Journal    
DOI: 10.1557/S1092578300000326     Document Type: Article

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