Surface deformation of the InGaN thin films deposited on a sapphire substrate

Thin Solid Films

Volumn 295, Issue 1-2, 1997, Pages 193-198

  Nowak, R ^a   Soga, T ^a   Umeno, M ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Anisotropy; Hardness; Monolayers

Indexed keywords

ANISOTROPY; ATOMIC FORCE MICROSCOPY; DEFORMATION; DEPOSITION; HARDNESS; MAGNESIUM; METALORGANIC CHEMICAL VAPOR DEPOSITION; SAPPHIRE; SEMICONDUCTOR DOPING; SUBSTRATES; SURFACE PROPERTIES; THIN FILMS;

DEPTH SENSING INDENTATION METHODS;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0031070517     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09143-2     Document Type: Article

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