Interfacial effects on moisture absorption in thin polymer films

Langmuir

Volumn 20, Issue 13, 2004, Pages 5285-5290

  Vogt, Bryan D ^a   Soles, Christopher L ^a   Jones, Ronald L ^a   Wang, Chia Ying ^a   Lin, Eric K ^a   Wu, Wen Li ^a   Satija, Sushil K ^a   Goldfarb, Dario L ^b   Angelopoulos, Marie ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTORESIST FILMS; POLYMER FILMS; SILICON-POLYMER INTERFACES;

ABSORPTION; HYDROPHILICITY; INTERFACES (MATERIALS); MOISTURE; PHOTORESISTS; SILICON WAFERS; SOLUBILITY; THIN FILMS;

POLYMERS;

ABSORPTION; INTERFACES; MOISTURE; POLYMERS; SILICON; SOLUBILITY; THIN FILMS;

EID: 3042587325     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la035830f     Document Type: Article

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