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Volumn 287, Issue 2, 2006, Pages 694-697
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Horizontal growth of epitaxial (1 0 0) β-FeSi2 templates by metal-organic chemical vapor deposition
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Author keywords
A3. Metal organic chemical vapor deposition; A3. Thin film; B1. FeSi2
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Indexed keywords
CRYSTAL STRUCTURE;
CRYSTALS;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
SILICON COMPOUNDS;
THIN FILMS;
Β-FESI2;
HORIZONTAL GROWTH;
OVERGROWTH PROCESS;
SIDEWALL PLANES;
EPITAXIAL GROWTH;
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EID: 30344483628
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2005.10.097 Document Type: Conference Paper |
Times cited : (3)
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References (15)
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