Modeling and experimental results for an RTP light-pipe radiation thermometer calibration testbed

12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2004

Volumn , Issue , 2004, Pages 175-180

  Ball, Kenneth S ^a   Howell, John R ^b  

^a Virginia Polytechnic Institute and State University   (United States)

^b The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT PIPE THERMOMETERS; RADIATION THERMOMETERS; RAPID THERMAL PROCESSING;

CALIBRATION; HEAT TREATMENT; SILICON WAFERS; SURFACE PROPERTIES; TEMPERATURE DISTRIBUTION; THERMOCOUPLES;

THERMOMETERS;

EID: 28344431694     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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