Modeling of a radiative RTP-type furnace through an inverse design: Mathematical model and experimental results

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 3, Issue , 2002, Pages 237-246

  Gamba, Mirko ^a   Ertürk, Hakan ^a   Ezekoye, Ofodike A ^a   Howell, John R ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONJUGATE GRADIENT METHOD; DESIGN; HEAT FLUX; INVERSE PROBLEMS; MECHANICAL ENGINEERING; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

AXISYMMETRIC; DESIGN SURFACES; DESIGN TOOL; EXPERIMENTAL CONFIRMATION; EXPERIMENTAL MEASUREMENTS; FINAL OBJECTIVE; HEAT FLUX DISTRIBUTIONS; INVERSE APPROACH; INVERSE DESIGNS; MONTE CARLO MODEL; NUMERICAL RESULTS; PHYSICAL SYSTEMS; POWER INPUT; RADIATION SHIELD; RADIATIVE HEAT; SEMI-CONDUCTOR WAFER; SEMICONDUCTOR INDUSTRY; SYSTEM MODELS; THERMAL DESIGNS; VACUUM CHAMBERS; WAFER SURFACE;

MATHEMATICAL MODELS;

EID: 78249281339     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2002-33844     Document Type: Conference Paper

References (13)

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