Investigation of volumetric radiation effects in lightpipe thermometry

12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2004

Volumn , Issue , 2004, Pages 195-202

  Frankman, David J ^a   Webb, Brent W ^a   Jones, Matthew R ^a  

^a Brigham Young University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

RADIATION EFFECTS; SILICON WAFERS; TEMPERATURE MEASUREMENT; TRANSPARENCY;

RAPID THERMAL PROCESSING; THERMOMETRY; VOLUMETRIC RADIATION EFFECTS;

THERMOMETERS;

EID: 28344439187     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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