Investigation of ion irradiation effects in a-SiXC1-X:H thin films

Vacuum

Volumn 68, Issue 3, 2002, Pages 257-261

  Grigonis, A ^a   Silinskas M ^a   Kopustinskas, V ^b  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Diamond like carbon; Ion beam deposition; Ion irradiation

Indexed keywords

CURRENT DENSITY; DEPOSITION; DIAMOND LIKE CARBON FILMS; ELECTRIC CONDUCTIVITY; ELLIPSOMETRY; ION BEAMS; IRRADIATION; RAMAN SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

ION IRRADIATIONS;

THIN FILMS;

EID: 0037145939     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00454-2     Document Type: Conference Paper

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