Optical and electron paramagnetic resonance studies of hydrogenated amorphous carbon (a-C:H) thin films formed by direct ion beam deposition method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4415, Issue , 2001, Pages 266-271

  Silinskas M ^a   Grigonis, A ^a   Dikcius G ^b   Manikowski, H ^c  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b VILNIUS UNIVERSITY   (Lithuania)

^c POZNAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Diamond like carbon; Ellipsometry; EPR; Hydrogenated amorphous carbon (a C:H); Ion beam deposition; Raman spectroscopy

Indexed keywords

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; HYDROGENATION; INFRARED RADIATION; ION BEAM ASSISTED DEPOSITION; PARAMAGNETIC RESONANCE; RAMAN SPECTROSCOPY; SUBSTRATES; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

HYDROGENATED AMORPHOUS CARBON FILMS;

DIAMOND LIKE CARBON FILMS;

EID: 0034929448     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.425504     Document Type: Article

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