Manipulation of Si oxide and electrically conducting carbon films by scanning probe microscopy (SPM): Nano-lithography and nano-machining

Thin Solid Films

Volumn 459, Issue 1-2, 2004, Pages 90-94

  Myhra, S ^a  

^a GRIFFITH UNIVERSITY   (Australia)

Author keywords

Diamond like carbon; Nano machining; Nano writing; Scanning probe microscopy; Si oxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; CHEMICAL VAPOR DEPOSITION; DATA STORAGE EQUIPMENT; ELECTRIC CONDUCTIVITY; NANOTECHNOLOGY; SILICON WAFERS; THIN FILMS;

DIAMOND-LIKE CARBON; NANO-MACHINING; NANO-WRITING; SCANNING PROBE MICROSCOPY (SPM);

SILICA;

EID: 2942624045     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.12.104     Document Type: Conference Paper

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