Nanolithography of metal films using scanning force microscope patterned carbon masks

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3879-3882

  Muhl T ^a   Bruckl H ^b   Kraut, D ^a   Kretz, J ^a   Monch I ^a   Reiss, G ^b  

^a IFW DRESDEN   (Germany)

^b BIELEFELD UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000029702     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590435     Document Type: Article

References (12)

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