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Journal of Applied Physics

Volumn 95, Issue 10, 2004, Pages 5602-5607

Deep depletion phenomenon of SrTiO3 gate dielectric capacitor

(3) Liu, Chih Yi a Chen, Bo Yang a Tseng, Tseung Yuen a

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC FIELDS; ELECTRIC INSULATORS; ELECTRIC POTENTIAL; ELECTRON TUNNELING; MAGNETRON SPUTTERING; METAL INSULATOR TRANSITION; SILICON; SUBSTRATES;

EQUIVALENT OXIDE THICKNESS (EOT); FILM PROCESSING; SILICON SUBSTRATES;

SEMICONDUCTOR MATERIALS;

EID: 2942601567 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1704850 Document Type: Article

Times cited : (25)

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