Properties and structures of diamond-like carbon film deposited using He, Ne, Ar/methane mixture by plasma enhanced chemical vapor deposition

Journal of Applied Physics

Volumn 87, Issue 11, 2000, Pages 8122-8131

  Sun, Z ^a   Lin, C H ^a   Lee, Y L ^a   Shi, J R ^a   Tay, B K ^a   Shi, X ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000737145     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373507     Document Type: Article

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