Ar dilution effects on the elastic properties of hydrogenated amorphous hard-carbon films grown by plasma-enhanced chemical vapor deposition

Journal of Applied Physics

Volumn 89, Issue 2, 2001, Pages 1003-1007

  Valentini, L ^a   Kenny, J M ^a   Carlotti, G ^a   Socino, G ^a   Lozzi, L ^b   Santucci, S ^b  

^a UNIVERSITY OF PERUGIA   (Italy)

^b UNIVERSITY OF L'AQUILA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000391543     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1330762     Document Type: Article

References (22)

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