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Volumn 329, Issue 1-2, 2000, Pages 66-70
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Gaseous precursors of diamond-like carbon films in CH4 /Ar plasmas
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0002483132
PISSN: 00092614
EISSN: None
Source Type: Journal
DOI: 10.1016/S0009-2614(00)00949-0 Document Type: Article |
Times cited : (50)
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References (32)
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