메뉴 건너뛰기




Volumn 214, Issue 3, 2004, Pages 252-260

Thermal stability of Ti and Pt nanowires manufactured by Ga+ focused ion beam

Author keywords

Focused ion beam (FIB); Nanoparticles; Nanowires; Pt; Thermal stability; Ti

Indexed keywords

ALUMINA; ALUMINUM OXIDE; FOCUSED ION BEAMS; IONS; MOLECULAR BEAM EPITAXY; NANOWIRES; PLATINUM; SINGLE CRYSTALS; THERMODYNAMIC STABILITY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; WIRE;

EID: 2942572693     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.0022-2720.2004.01344.x     Document Type: Conference Paper
Times cited : (17)

References (30)
  • 1
    • 0032024724 scopus 로고    scopus 로고
    • Interface formation between ultrathin films of titanium and (0001) sapphire substrates
    • Bernath, S., Wagner, T., Hofmann, S. & Ruhle, M. (1998) Interface formation between ultrathin films of titanium and (0001) sapphire substrates. Surf. Sci. 400, 335-344.
    • (1998) Surf. Sci. , vol.400 , pp. 335-344
    • Bernath, S.1    Wagner, T.2    Hofmann, S.3    Ruhle, M.4
  • 4
    • 0001103030 scopus 로고    scopus 로고
    • In situ transmission electron microscopy study of dislocations in a polycrystalline Cu thin film constrained by a substrate
    • Dehm, G. & Arzt, E. (2000) In situ transmission electron microscopy study of dislocations in a polycrystalline Cu thin film constrained by a substrate. Appl. Phys. Lett. 77, 1126-1128.
    • (2000) Appl. Phys. Lett. , vol.77 , pp. 1126-1128
    • Dehm, G.1    Arzt, E.2
  • 5
    • 0036520796 scopus 로고    scopus 로고
    • Plasticity and interfacial dislocation mechanisms in epitaxial and polycrystalline Al films constrained by substrates
    • Dehm, G., Wagner, T., Balk, T.J., Arzt, E. & Inkson, B.J. (2002) Plasticity and interfacial dislocation mechanisms in epitaxial and polycrystalline Al films constrained by substrates. J. Mat. Sci. Technol. 18, 113-117.
    • (2002) J. Mat. Sci. Technol. , vol.18 , pp. 113-117
    • Dehm, G.1    Wagner, T.2    Balk, T.J.3    Arzt, E.4    Inkson, B.J.5
  • 6
    • 0033267624 scopus 로고    scopus 로고
    • Lateral growth of focused ion beam deposited platinum for stencil mask repair
    • DeMarco, A.J. & Melngailis, J. (1999) Lateral growth of focused ion beam deposited platinum for stencil mask repair. J. Vac. Sci. Technol B, 17, 3154-3157.
    • (1999) J. Vac. Sci. Technol B , vol.17 , pp. 3154-3157
    • DeMarco, A.J.1    Melngailis, J.2
  • 7
    • 0027659529 scopus 로고
    • An in situ study of prismatic glide in a titanium at low temperatures
    • Farenc, S., Caillard, D. & Couret, A. (1993) An in situ study of prismatic glide in a titanium at low temperatures. Acta Metall. Mater. 41, 2701-2709.
    • (1993) Acta Metall. Mater. , vol.41 , pp. 2701-2709
    • Farenc, S.1    Caillard, D.2    Couret, A.3
  • 9
    • 0026837821 scopus 로고
    • Thermal reactions of thin Ti films with sapphire substrates
    • Iida, S., Hidemura, Y., Higashimukai, K. & Nagata, S. (1992) Thermal reactions of thin Ti films with sapphire substrates. Appl. Surf. Sci. 56, 816-820.
    • (1992) Appl. Surf. Sci. , vol.56 , pp. 816-820
    • Iida, S.1    Hidemura, Y.2    Higashimukai, K.3    Nagata, S.4
  • 10
    • 85167473072 scopus 로고    scopus 로고
    • In-situ observation of dislocation motion in Al nanowires
    • Inkson, B.J., Dehm, G. & Wagner, T. (2000) In-situ observation of dislocation motion in Al nanowires. Proc. EUREM, 2, 539-540.
    • (2000) Proc. EUREM , vol.2 , pp. 539-540
    • Inkson, B.J.1    Dehm, G.2    Wagner, T.3
  • 11
    • 0037016067 scopus 로고    scopus 로고
    • In situ TEM observation of dislocation motion in thermally strained Al nanowires
    • Inkson, B.J., Dehm, G. & Wagner, T. (2002) In situ TEM observation of dislocation motion in thermally strained Al nanowires. Acta Mater. 50, 5033-5047.
    • (2002) Acta Mater. , vol.50 , pp. 5033-5047
    • Inkson, B.J.1    Dehm, G.2    Wagner, T.3
  • 12
    • 0000124840 scopus 로고    scopus 로고
    • In situ transmission electron microscopy study of plastic deformation in passivated Al-Cu thin films
    • Jawarani, D., Kawasaki, H., Yeo, I.S., Rabenberg, L., Stark, J.P. & Ho, P.S. (1997) In situ transmission electron microscopy study of plastic deformation in passivated Al-Cu thin films. J. Appl. Phys. 82, 171-181.
    • (1997) J. Appl. Phys. , vol.82 , pp. 171-181
    • Jawarani, D.1    Kawasaki, H.2    Yeo, I.S.3    Rabenberg, L.4    Stark, J.P.5    Ho, P.S.6
  • 16
    • 0032048189 scopus 로고    scopus 로고
    • Stabilized platinum electrodes for ferroelectric film deposition using Ti, Ta and Zr adhesion layers
    • Maeder, T., Sagalowicz, L. & Muralt, P. (1998) Stabilized platinum electrodes for ferroelectric film deposition using Ti, Ta and Zr adhesion layers. Jap. J. Appl. Phys. Part 1, 37 (4A), 2007-2012.
    • (1998) Jap. J. Appl. Phys. Part 1 , vol.37 , Issue.4 A , pp. 2007-2012
    • Maeder, T.1    Sagalowicz, L.2    Muralt, P.3
  • 18
    • 0024766321 scopus 로고
    • Mechanical properties of thin films
    • Nix, W.D. (1989) Mechanical properties of thin films. Metall. Trans. A, 20, 2217-2245.
    • (1989) Metall. Trans. A , vol.20 , pp. 2217-2245
    • Nix, W.D.1
  • 19
    • 0041760448 scopus 로고    scopus 로고
    • Elastic andplastic properties of thin films on substrates: Nanoindentation techniques
    • Nix, W.D. (1997) Elastic andplastic properties of thin films on substrates: nanoindentation techniques. Mat. Sci. Eng. A, 234, 37-44.
    • (1997) Mat. Sci. Eng. A , vol.234 , pp. 37-44
    • Nix, W.D.1
  • 20
    • 0027542088 scopus 로고
    • Hydride precipitation in vapor-deposited Ti thin-films
    • Peddada, S.R., Robertson, I.M. & Birnbaum, H.K. (1993) Hydride precipitation in vapor-deposited Ti thin-films. J. Mat. Res. 8, 291-296.
    • (1993) J. Mat. Res. , vol.8 , pp. 291-296
    • Peddada, S.R.1    Robertson, I.M.2    Birnbaum, H.K.3
  • 21
    • 0031188564 scopus 로고    scopus 로고
    • Growth of Ti thin films on sapphire substrates
    • Peddada, S.R., Robertson, I.M. & Birnbaum, H.K. (1997) Growth of Ti thin films on sapphire substrates. J. Mat. Res. 12, 1856-1865.
    • (1997) J. Mat. Res. , vol.12 , pp. 1856-1865
    • Peddada, S.R.1    Robertson, I.M.2    Birnbaum, H.K.3
  • 22
    • 0038974363 scopus 로고    scopus 로고
    • Void formation by thermal stress concentration at twin interfaces in Cu thin films
    • Sekiguchi, A., Koike, J., Kamiya, S., Saka, M. & Maruyama, K. (2001) Void formation by thermal stress concentration at twin interfaces in Cu thin films. Appl. Phys. Lett. 79, 1264-1266.
    • (2001) Appl. Phys. Lett. , vol.79 , pp. 1264-1266
    • Sekiguchi, A.1    Koike, J.2    Kamiya, S.3    Saka, M.4    Maruyama, K.5
  • 23
    • 84976384272 scopus 로고    scopus 로고
    • Thermal stability of a Ti-Si-N diffusion barrier in contact with a Ti adhesion layer for Au metallization
    • Shalish, I. & Shapira, Y. (1999) Thermal stability of a Ti-Si-N diffusion barrier in contact with a Ti adhesion layer for Au metallization. J. Vac. Sci. Technol. B, 17, 166-173.
    • (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 166-173
    • Shalish, I.1    Shapira, Y.2
  • 24
    • 36449002472 scopus 로고
    • Investigation of Pt/Ti bilayer metallization on silicon for ferroe-lectric thin-film integration
    • Sreenivas, K., Reaney, I., Maeder, T., Setter, N., Jagadish, C. & Elliman, R.G. (1994) Investigation of Pt/Ti bilayer metallization on silicon for ferroe-lectric thin-film integration. J. Appl. Phys. 75, 232-239.
    • (1994) J. Appl. Phys. , vol.75 , pp. 232-239
    • Sreenivas, K.1    Reaney, I.2    Maeder, T.3    Setter, N.4    Jagadish, C.5    Elliman, R.G.6
  • 25
    • 0037166620 scopus 로고    scopus 로고
    • 3D FIB mapping of nanoindentation zones in a Cu-Ti multilayered coating
    • Steer, T.J., Möbus, G., Wagner, T., Kraft, O. & Inkson, B.J. (2002) 3D FIB mapping of nanoindentation zones in a Cu-Ti multilayered coating. Thin Solid Films, 413, 147-154.
    • (2002) Thin Solid Films , vol.413 , pp. 147-154
    • Steer, T.J.1    Möbus, G.2    Wagner, T.3    Kraft, O.4    Inkson, B.J.5
  • 26
    • 0000732363 scopus 로고
    • Focused ion beam induced deposition of platinum for repair processes
    • Tao, T., Wilkinson, W. & Melngailis, J. (1991) Focused ion beam induced deposition of platinum for repair processes. J. Vac. Sci. Technol. B, 9, 162-164.
    • (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 162-164
    • Tao, T.1    Wilkinson, W.2    Melngailis, J.3
  • 27
    • 0037109371 scopus 로고    scopus 로고
    • 3-titanium adhesion in the view of the diffusion bonding process
    • 3-titanium adhesion in the view of the diffusion bonding process. J. Mat. Sci. 37, 4385-4390.
    • (2002) J. Mat. Sci. , vol.37 , pp. 4385-4390
    • Travessa, D.1    Ferrante, M.2
  • 28
  • 29
    • 0037413739 scopus 로고    scopus 로고
    • Orientation dependence of cyclic deformation behaviour and dislocation structure in Ti-5at.%Al single crystals
    • Xiao, L. & Umakoshi, Y. (2003) Orientation dependence of cyclic deformation behaviour and dislocation structure in Ti-5at.%Al single crystals. Mat. Sci. Eng. A339, 63-72.
    • (2003) Mat. Sci. Eng. A , vol.339 , pp. 63-72
    • Xiao, L.1    Umakoshi, Y.2
  • 30
    • 0001100786 scopus 로고
    • Focused ion beam insulator deposition
    • Young, R.J. & Puretz, J. (1995) Focused ion beam insulator deposition. J. Vac. Sci. Technol. B. 13, 2576-2579.
    • (1995) J. Vac. Sci. Technol. B. , vol.13 , pp. 2576-2579
    • Young, R.J.1    Puretz, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.