-
1
-
-
0032024724
-
Interface formation between ultrathin films of titanium and (0001) sapphire substrates
-
Bernath, S., Wagner, T., Hofmann, S. & Ruhle, M. (1998) Interface formation between ultrathin films of titanium and (0001) sapphire substrates. Surf. Sci. 400, 335-344.
-
(1998)
Surf. Sci.
, vol.400
, pp. 335-344
-
-
Bernath, S.1
Wagner, T.2
Hofmann, S.3
Ruhle, M.4
-
2
-
-
0035876318
-
Performance of Zr and Ti adhesion layers for bonding of platinum metallization to sapphire substrates
-
Bernhardt, G., Silvestre, C., LeCursi, N., Moulzolf, S.C., Frankel, D.J. & Lad, R.J. (2001) Performance of Zr and Ti adhesion layers for bonding of platinum metallization to sapphire substrates. Sensors Actuators B-Chem. 77, 368-374.
-
(2001)
Sensors Actuators B-Chem.
, vol.77
, pp. 368-374
-
-
Bernhardt, G.1
Silvestre, C.2
LeCursi, N.3
Moulzolf, S.C.4
Frankel, D.J.5
Lad, R.J.6
-
3
-
-
0001222113
-
Focused ion beam induced deposition of low resistivity gold films
-
Blauner, P., Butt, Y., Ro, J., Thompson, C. & Melngailis, J. (1989) Focused ion beam induced deposition of low resistivity gold films. J. Vac. Sci. Technol. B7, 1816-1818.
-
(1989)
J. Vac. Sci. Technol. B
, vol.7
, pp. 1816-1818
-
-
Blauner, P.1
Butt, Y.2
Ro, J.3
Thompson, C.4
Melngailis, J.5
-
4
-
-
0001103030
-
In situ transmission electron microscopy study of dislocations in a polycrystalline Cu thin film constrained by a substrate
-
Dehm, G. & Arzt, E. (2000) In situ transmission electron microscopy study of dislocations in a polycrystalline Cu thin film constrained by a substrate. Appl. Phys. Lett. 77, 1126-1128.
-
(2000)
Appl. Phys. Lett.
, vol.77
, pp. 1126-1128
-
-
Dehm, G.1
Arzt, E.2
-
5
-
-
0036520796
-
Plasticity and interfacial dislocation mechanisms in epitaxial and polycrystalline Al films constrained by substrates
-
Dehm, G., Wagner, T., Balk, T.J., Arzt, E. & Inkson, B.J. (2002) Plasticity and interfacial dislocation mechanisms in epitaxial and polycrystalline Al films constrained by substrates. J. Mat. Sci. Technol. 18, 113-117.
-
(2002)
J. Mat. Sci. Technol.
, vol.18
, pp. 113-117
-
-
Dehm, G.1
Wagner, T.2
Balk, T.J.3
Arzt, E.4
Inkson, B.J.5
-
6
-
-
0033267624
-
Lateral growth of focused ion beam deposited platinum for stencil mask repair
-
DeMarco, A.J. & Melngailis, J. (1999) Lateral growth of focused ion beam deposited platinum for stencil mask repair. J. Vac. Sci. Technol B, 17, 3154-3157.
-
(1999)
J. Vac. Sci. Technol B
, vol.17
, pp. 3154-3157
-
-
DeMarco, A.J.1
Melngailis, J.2
-
7
-
-
0027659529
-
An in situ study of prismatic glide in a titanium at low temperatures
-
Farenc, S., Caillard, D. & Couret, A. (1993) An in situ study of prismatic glide in a titanium at low temperatures. Acta Metall. Mater. 41, 2701-2709.
-
(1993)
Acta Metall. Mater.
, vol.41
, pp. 2701-2709
-
-
Farenc, S.1
Caillard, D.2
Couret, A.3
-
9
-
-
0026837821
-
Thermal reactions of thin Ti films with sapphire substrates
-
Iida, S., Hidemura, Y., Higashimukai, K. & Nagata, S. (1992) Thermal reactions of thin Ti films with sapphire substrates. Appl. Surf. Sci. 56, 816-820.
-
(1992)
Appl. Surf. Sci.
, vol.56
, pp. 816-820
-
-
Iida, S.1
Hidemura, Y.2
Higashimukai, K.3
Nagata, S.4
-
10
-
-
85167473072
-
In-situ observation of dislocation motion in Al nanowires
-
Inkson, B.J., Dehm, G. & Wagner, T. (2000) In-situ observation of dislocation motion in Al nanowires. Proc. EUREM, 2, 539-540.
-
(2000)
Proc. EUREM
, vol.2
, pp. 539-540
-
-
Inkson, B.J.1
Dehm, G.2
Wagner, T.3
-
11
-
-
0037016067
-
In situ TEM observation of dislocation motion in thermally strained Al nanowires
-
Inkson, B.J., Dehm, G. & Wagner, T. (2002) In situ TEM observation of dislocation motion in thermally strained Al nanowires. Acta Mater. 50, 5033-5047.
-
(2002)
Acta Mater.
, vol.50
, pp. 5033-5047
-
-
Inkson, B.J.1
Dehm, G.2
Wagner, T.3
-
12
-
-
0000124840
-
In situ transmission electron microscopy study of plastic deformation in passivated Al-Cu thin films
-
Jawarani, D., Kawasaki, H., Yeo, I.S., Rabenberg, L., Stark, J.P. & Ho, P.S. (1997) In situ transmission electron microscopy study of plastic deformation in passivated Al-Cu thin films. J. Appl. Phys. 82, 171-181.
-
(1997)
J. Appl. Phys.
, vol.82
, pp. 171-181
-
-
Jawarani, D.1
Kawasaki, H.2
Yeo, I.S.3
Rabenberg, L.4
Stark, J.P.5
Ho, P.S.6
-
15
-
-
0035879723
-
Dynamic observation of Al thin films plastically strained in a TEM
-
Legros, M., Dehm, G., Keller-Flaig, R.M., Arzt, E., Hemker, K.J. & Suresh, S. (2001) Dynamic observation of Al thin films plastically strained in a TEM. Mat. Sci. Eng. A, 309, 463-467.
-
(2001)
Mat. Sci. Eng. A
, vol.309
, pp. 463-467
-
-
Legros, M.1
Dehm, G.2
Keller-Flaig, R.M.3
Arzt, E.4
Hemker, K.J.5
Suresh, S.6
-
16
-
-
0032048189
-
Stabilized platinum electrodes for ferroelectric film deposition using Ti, Ta and Zr adhesion layers
-
Maeder, T., Sagalowicz, L. & Muralt, P. (1998) Stabilized platinum electrodes for ferroelectric film deposition using Ti, Ta and Zr adhesion layers. Jap. J. Appl. Phys. Part 1, 37 (4A), 2007-2012.
-
(1998)
Jap. J. Appl. Phys. Part 1
, vol.37
, Issue.4 A
, pp. 2007-2012
-
-
Maeder, T.1
Sagalowicz, L.2
Muralt, P.3
-
17
-
-
0020116080
-
{1122} 〈1123〉 slip in titanium
-
Minonishi, Y., Morozumi, S. & Yoshinaga, H. (1982) {1122} 〈1123〉 slip in titanium. Scripta Metall. 16, 427-430.
-
(1982)
Scripta Metall.
, vol.16
, pp. 427-430
-
-
Minonishi, Y.1
Morozumi, S.2
Yoshinaga, H.3
-
18
-
-
0024766321
-
Mechanical properties of thin films
-
Nix, W.D. (1989) Mechanical properties of thin films. Metall. Trans. A, 20, 2217-2245.
-
(1989)
Metall. Trans. A
, vol.20
, pp. 2217-2245
-
-
Nix, W.D.1
-
19
-
-
0041760448
-
Elastic andplastic properties of thin films on substrates: Nanoindentation techniques
-
Nix, W.D. (1997) Elastic andplastic properties of thin films on substrates: nanoindentation techniques. Mat. Sci. Eng. A, 234, 37-44.
-
(1997)
Mat. Sci. Eng. A
, vol.234
, pp. 37-44
-
-
Nix, W.D.1
-
20
-
-
0027542088
-
Hydride precipitation in vapor-deposited Ti thin-films
-
Peddada, S.R., Robertson, I.M. & Birnbaum, H.K. (1993) Hydride precipitation in vapor-deposited Ti thin-films. J. Mat. Res. 8, 291-296.
-
(1993)
J. Mat. Res.
, vol.8
, pp. 291-296
-
-
Peddada, S.R.1
Robertson, I.M.2
Birnbaum, H.K.3
-
21
-
-
0031188564
-
Growth of Ti thin films on sapphire substrates
-
Peddada, S.R., Robertson, I.M. & Birnbaum, H.K. (1997) Growth of Ti thin films on sapphire substrates. J. Mat. Res. 12, 1856-1865.
-
(1997)
J. Mat. Res.
, vol.12
, pp. 1856-1865
-
-
Peddada, S.R.1
Robertson, I.M.2
Birnbaum, H.K.3
-
22
-
-
0038974363
-
Void formation by thermal stress concentration at twin interfaces in Cu thin films
-
Sekiguchi, A., Koike, J., Kamiya, S., Saka, M. & Maruyama, K. (2001) Void formation by thermal stress concentration at twin interfaces in Cu thin films. Appl. Phys. Lett. 79, 1264-1266.
-
(2001)
Appl. Phys. Lett.
, vol.79
, pp. 1264-1266
-
-
Sekiguchi, A.1
Koike, J.2
Kamiya, S.3
Saka, M.4
Maruyama, K.5
-
23
-
-
84976384272
-
Thermal stability of a Ti-Si-N diffusion barrier in contact with a Ti adhesion layer for Au metallization
-
Shalish, I. & Shapira, Y. (1999) Thermal stability of a Ti-Si-N diffusion barrier in contact with a Ti adhesion layer for Au metallization. J. Vac. Sci. Technol. B, 17, 166-173.
-
(1999)
J. Vac. Sci. Technol. B
, vol.17
, pp. 166-173
-
-
Shalish, I.1
Shapira, Y.2
-
24
-
-
36449002472
-
Investigation of Pt/Ti bilayer metallization on silicon for ferroe-lectric thin-film integration
-
Sreenivas, K., Reaney, I., Maeder, T., Setter, N., Jagadish, C. & Elliman, R.G. (1994) Investigation of Pt/Ti bilayer metallization on silicon for ferroe-lectric thin-film integration. J. Appl. Phys. 75, 232-239.
-
(1994)
J. Appl. Phys.
, vol.75
, pp. 232-239
-
-
Sreenivas, K.1
Reaney, I.2
Maeder, T.3
Setter, N.4
Jagadish, C.5
Elliman, R.G.6
-
25
-
-
0037166620
-
3D FIB mapping of nanoindentation zones in a Cu-Ti multilayered coating
-
Steer, T.J., Möbus, G., Wagner, T., Kraft, O. & Inkson, B.J. (2002) 3D FIB mapping of nanoindentation zones in a Cu-Ti multilayered coating. Thin Solid Films, 413, 147-154.
-
(2002)
Thin Solid Films
, vol.413
, pp. 147-154
-
-
Steer, T.J.1
Möbus, G.2
Wagner, T.3
Kraft, O.4
Inkson, B.J.5
-
26
-
-
0000732363
-
Focused ion beam induced deposition of platinum for repair processes
-
Tao, T., Wilkinson, W. & Melngailis, J. (1991) Focused ion beam induced deposition of platinum for repair processes. J. Vac. Sci. Technol. B, 9, 162-164.
-
(1991)
J. Vac. Sci. Technol. B
, vol.9
, pp. 162-164
-
-
Tao, T.1
Wilkinson, W.2
Melngailis, J.3
-
27
-
-
0037109371
-
3-titanium adhesion in the view of the diffusion bonding process
-
3-titanium adhesion in the view of the diffusion bonding process. J. Mat. Sci. 37, 4385-4390.
-
(2002)
J. Mat. Sci.
, vol.37
, pp. 4385-4390
-
-
Travessa, D.1
Ferrante, M.2
-
28
-
-
0029325729
-
Thermal strain and stress in copper thin aims
-
Vinci, R.P., Zielinski, E.M. & Bravman, J.C. (1995) Thermal strain and stress in copper thin aims. Thin Solid Films, 262, 142-153.
-
(1995)
Thin Solid Films
, vol.262
, pp. 142-153
-
-
Vinci, R.P.1
Zielinski, E.M.2
Bravman, J.C.3
-
29
-
-
0037413739
-
Orientation dependence of cyclic deformation behaviour and dislocation structure in Ti-5at.%Al single crystals
-
Xiao, L. & Umakoshi, Y. (2003) Orientation dependence of cyclic deformation behaviour and dislocation structure in Ti-5at.%Al single crystals. Mat. Sci. Eng. A339, 63-72.
-
(2003)
Mat. Sci. Eng. A
, vol.339
, pp. 63-72
-
-
Xiao, L.1
Umakoshi, Y.2
-
30
-
-
0001100786
-
Focused ion beam insulator deposition
-
Young, R.J. & Puretz, J. (1995) Focused ion beam insulator deposition. J. Vac. Sci. Technol. B. 13, 2576-2579.
-
(1995)
J. Vac. Sci. Technol. B.
, vol.13
, pp. 2576-2579
-
-
Young, R.J.1
Puretz, J.2
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