Growth of Ti thin films on sapphire substrates

Journal of Materials Research

Volumn 12, Issue 7, 1997, Pages 1856-1865

  Rao Peddada, S ^a,b   Robertson, I M ^a   Birnbaum, H K ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ELECTRON BEAMS; FILM GROWTH; INTERDIFFUSION (SOLIDS); INTERFACES (MATERIALS); SAPPHIRE; SINGLE CRYSTALS; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; VAPOR DEPOSITION; X RAY CRYSTALLOGRAPHY;

ELECTRON BEAM PHYSICAL VAPOR DEPOSITION;

TITANIUM;

EID: 0031188564     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.1997.0255     Document Type: Article

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