Investigation on the cross sensitivity of NO2 sensors based on In2O3 thin films prepared by sol-gel and vacuum thermal evaporation

Thin Solid Films

Volumn 350, Issue 1, 1999, Pages 276-282

  Cantalini, C ^a   Wlodarski, W ^b   Sun, H T ^b   Atashbar, M Z ^b   Passacantando, M ^a   Phani, A R ^a   Santucci, S ^a  

^a INFM   (Italy)

^b RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; CRYSTAL MICROSTRUCTURE; EVAPORATION; INDIUM COMPOUNDS; MORPHOLOGY; NITROGEN OXIDES; SCANNING ELECTRON MICROSCOPY; SOL-GELS; STOICHIOMETRY; VACUUM TECHNOLOGY; X RAY CRYSTALLOGRAPHY; X RAY PHOTOELECTRON SPECTROSCOPY;

GLANCING ANGLE X-RAY DIFFRACTION; HIGH VACUUM THERMAL EVAPORATION (HVTE); INDIUM OXIDE;

THIN FILM DEVICES;

EID: 0032663896     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00269-2     Document Type: Article

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