Ellipsometry as a rapid method of establishing a correlation between the porosity and the gas sensitivity of tin dioxide layers

Technical Physics

Volumn 44, Issue 4, 1999, Pages 468-469

  Dimitrov, D Ts ^a   Luchinin, V V ^a   Moshnikov, V A ^a   Panov, M V ^a  

^a SAINT PETERSBURG ELECTROTECHNICAL UNIVERSITY LETI   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033247204     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1259325     Document Type: Article

References (8)

1. S. R. Morrison, Sensors and Actuators, No. 12, 425 (1987).
2. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light [North Holland, Amsterdam, 1977; Mir, Moscow, 1981].
3. T. Oyabu, Y. Ohta, and T. Kurobe, Sensors and Actuators, No. 9, 301 (1986).
4. A. S. Bakin, M. V. Bestaev, D. Dimitrov et al., Thin Solid Films 296, 168 (1997).
5. K. I. Dolotov, A. B. Zil'berman, Yu. L. Il'in et al., Izv. Akad. Nauk Ross. Akad. Nauk Neorg. Mater., No. 1, 83 (1994).
6. V. I. Pshenitsyn, M. I. Abaev, and N. Yu. Lyzlov, Ellipsometry in Physicochemical Research [in Russian], Khimiya, Leningrad (1986).
7. M. V. Bestaev, D. Ts. Dimitrov, A. Yu. Il'in et al., Izv. Akad. Nauk SSSR, Ser. Fiz. 62, 549 (1998).
8. G. V. Rozhnov, N. V. Bukhtiyarova, V. A. Kemarskiǐ et al., in Ellipsometry: Theory, Methods and Applications [in Russian], Nauka, Novosibirsk (1991), pp. 34-44.