SCOPUS 정보 검색 플랫폼

Volumn 151, Issue 5, 2004, Pages

Performance and reliability of low-temperature processed SrBi 2Ta2O9 capacitors for FeRAM applications

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; DECOMPOSITION; DRY ETCHING; FERROELECTRIC MATERIALS; RANDOM ACCESS STORAGE; SPIN COATING; STRONTIUM ALLOYS; THICKNESS MEASUREMENT;

FERROELECTRIC RANDOM ACCESS MEMORY (FERAM); INTERLAYER DIELECTRIC (ILD); INTERMETAL DIELECTRIC (IMD); MEMORY CELLS;

CAPACITORS;

EID: 2942534095 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1687429 Document Type: Article

Times cited : (12)

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