Torque multiplication and stable range tradeoff in parallel plate angular electrostatic actuators with fixed DC bias

Journal of Microelectromechanical Systems

Volumn 14, Issue 6, 2005, Pages 1217-1222

  Pareek, Ajay ^a   Dokmeci, Mehmet R ^b   Bakshi, Shivalik ^c   Mastrangelo, Carlos H ^d  

^a TEXAS INSTRUMENTS   (United States)

^b Northeastern University   (United States)

^c BioScale   (United States)

^d Case Western Reserve University   (United States)

Author keywords

Electrostatic actuators; Micromirror; Parallel plate; Torque magnification

Indexed keywords

ELECTRIC POTENTIAL; MATHEMATICAL MODELS; MICROOPTICS; MIRRORS; TORQUE;

MICROMIRROR; PARALLEL-PLATE; TORQUE MAGNIFICATION;

ELECTROSTATIC ACTUATORS;

EID: 29244471306     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.859072     Document Type: Article

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