Bulk-micromachined silicon micromirror for tunable optical switch applications

IEEE Symposium on Emerging Technologies & Factory Automation, ETFA

Volumn 2, Issue , 1996, Pages 404-407

  Seo, Kyoung Sun ^a   Cho, Young Ho ^a   Youn, Sung Kie ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ELECTROSTATIC DEVICES; MICROMACHINING; MIRRORS; NATURAL FREQUENCIES; OPTICAL SWITCHES; SILICON;

BULK MICROMACHINED ELECTROSTATIC MICROMIRRORS; TUNABLE OPTICAL SWITCHING DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0030412869     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)