R.F. sputtering deposition of buffer layers for Si/YBCO integrated microelectronics

International Journal of Modern Physics B

Volumn 19, Issue 31, 2005, Pages 4605-4617

  Rombola G ^a   Ballarini, V ^a   Chiodoni, A ^a   Gozzelino, L ^a   Mezzetti, E ^a   Minetti, B ^a   Pirri, C F ^a   Tresso, E ^a   Camerlingo, C ^b  

^a POLITECNICO DI TORINO   (Italy)

^b CNR   (Italy)

Author keywords

Buffer layers; Integrated electronics; Silicon; Sputtering; Superconducting YBCO films

Indexed keywords

EID: 29244466156     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0217979205032929     Document Type: Article

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