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Volumn 768, Issue , 2003, Pages 69-74
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CeO2 thin films as buffer layers for Si/YBCO integrated microelectronics
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
ATOMIC FORCE MICROSCOPY;
CERIUM COMPOUNDS;
DEPOSITION;
DIFFRACTION;
MICROELECTRONICS;
RAMAN SPECTROSCOPY;
SEMICONDUCTOR MATERIALS;
SPUTTERING;
THERMAL EXPANSION;
THERMOMETERS;
X RAY DIFFRACTION ANALYSIS;
BUFFER LAYERS;
SUPERCONDUCTOR INTERFACE;
THIN FILMS;
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EID: 12144287007
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-768-g3.9 Document Type: Conference Paper |
Times cited : (2)
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References (18)
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