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Volumn 768, Issue , 2003, Pages 69-74

CeO2 thin films as buffer layers for Si/YBCO integrated microelectronics

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CERIUM COMPOUNDS; DEPOSITION; DIFFRACTION; MICROELECTRONICS; RAMAN SPECTROSCOPY; SEMICONDUCTOR MATERIALS; SPUTTERING; THERMAL EXPANSION; THERMOMETERS; X RAY DIFFRACTION ANALYSIS;

EID: 12144287007     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-768-g3.9     Document Type: Conference Paper
Times cited : (2)

References (18)
  • 12


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.