Optimizing fiber coupling with a quasi-passive microoptical bench

Journal of Microelectromechanical Systems

Volumn 14, Issue 6, 2005, Pages 1339-1346

  Li, Biao ^a   Wirz, Holger ^a   Sharon, Andre ^a  

^a Fraunhofer USA Inc   (United States)

Author keywords

Fiber coupling; Laser trimming; Microoptical bench; Nanoscale motion; Residual stress; Stoichiometric silicon nitride film

Indexed keywords

DEPOSITION; ELECTRONICS PACKAGING; INTEGRATED OPTOELECTRONICS; LASER BEAM EFFECTS; MICROOPTICS; RESIDUAL STRESSES; SILICON NITRIDE; STOICHIOMETRY; TENSILE STRESS; THIN FILMS;

FIBER-TO-FIBER ALIGNMENT; LASER TRIMMING; QUASI-PASSIVE MICROOPTICAL BENCH; TRIMMING STRESS ELEMENT;

OPTICAL FIBER COUPLING;

EID: 29244460067     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.859091     Document Type: Article

References (22)

1. S. Jordan, "Alignment of waveguide devices," PolyTec PI Tech Note, 2002.
2. M. R. Matthews, B. M. MacDonald, and K. R. Preston, "Optical components - The new challenge in packaging," IEEE Trans. Comp., Hybr., Manufact. Tech., vol. 13, no. 4, pp. 798-806, 1990.
3. T. Eom, Y. Kim, G. Yang, U. Paek, and B. H. Lee, "Novel optical fiber connectors using long-period fiber grating," Proc. SPIE - Optical Devices for Fiber Communication III, vol. 4638, no. 17, 2002.
4. M. Eiklenborg and J. Scott, "Tools and methods for obtaining precision fiber alignments," in Proc. IMAPS Advanced Technology Workshop on Optoelectronics Packaging. Bethlehem, PA, Oct. 2001.
5. A. Weber, "Positioning for fiber optics assembly," Assembly Mag., May 1, 2001.
6. R. Hauffe, U. Siebel, K. Petermann, R. Moosburger, J. Kropp, and F. Arndt, "Methods for passive fiber chip coupling of integrated optical devices," IEEE Trans. Adv. Packag., vol. 24, pp. 450-455, 2001.
7. H. S. Cho, S. kang, M. H. Cho, B. S. Rho, H. Park, K. Shin, S. Ha, B. Rhee, D. Kim, S. Jung, and T. Kim, "Optical interconnection using fiber- embedded boards and connection blocks fabricated by a micro-grooving technique for fiber insertion," J Micromechan. Microeng., vol. 14, pp. 1181-1184, 2004.
8. J. Sin, D. Popa, and H. Stephanou, "Model based automatic fiber alignment," in Proc. Fiber Optic Automation Conference, 2002, pp. 415-420.
9. R. Jebens, W. Trimmer, and J. Walker, "Microactuators for aligning optical fibers," Sens. Actuators, vol. 20, no. 1 and 2, pp. 65-74, Nov. 1989.
10. M. Culpepper and G. Anderson, "Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism," J. Precision Eng., vol. 28, pp. 469-482, 2004.
11. R. Syms, H. Zou, J. Yao, D. Uttamchandani, and J. Stagg, "Scalable electrothermal MEMS actuator for optical fiber alignment," J Micromechan. Microeng., vol. 14, pp. 1633-1639, 2004.
12. K. Ishikawa, J. Zhang, A. Tuantranont, V. Bright, and Y. Lee, "An integrated micro-optical system for VCSEL-to-fiber active alignment," Sens. Actuators A, Phys., vol. A 103, pp. 109-115, 2003.
13. A. C. Goding, "Active alignment is here to stay," Photon. Spectra, vol. 36, p. 110, 2002.
14. J. Gao, K. Chase, and S. Magleby, "Comparison of assembly tolerance analysis by the direct linearization and modified monte carlo simulation methods," in Proc. ASME Design Engineering Technical Conference, Boston, MA, 1995, pp. 353-360.
15. P. Osterberg, H. Yie, X. Cai, J. White, and S. Senturia, "Self-consistent simulation and modeling of electrostatically deformed diaphragms," Proc. IEEE Microelectromech. Syst., pp. 28-32, 1994.
16. W.-H. Chuang, T. Luger, R. K. Fettig, R. Ghodssi, and R., "Mechanical property characterization of LPCVD silicon nitride thin films at cryogenic temperatures," J. Microelectromech. Syst., vol. 13, no. 870, 2004.
17. Generic Requirements Assurance-Requirements for Passive Optical Components (1999, Jan.).
18. B. Stannowski, J. Rath, and R. Schropp, "Hot-wire silicon nitride for thin-film transistors," SAFE2000, STW-Workshop: Semiconductor Advances for Future Electronics, Nov.-Dec. 29-1, 2000.
19. B. Li, Y. Wu, Y. Gui, H. Ye, Y Chang, L. He, and J. Chu, "Spectral analysis of annealed Hg1-xCdxTe molecular beam epitaxial films," Appl. Phys. Lett., vol. 73, no. 1376, 1998.
20. C. H. Seager and J. Kanicki, "Photodarkening and bleaching in amorphous silicon nitride," Appl. Phys. Lett., vol. 57, no. 1378, 1990.
21. B. Li, H. Yu, A. Sharon, and X. Zhang, "Rapid three-dimensional manufacturing of microfluidic structures using a scanning laser system," Appl. Phys. Lett., vol. 85, no. 2426, 2004.
22. R. Bostock, J. Collier, R. Jansen, R. Jones, D. Moore, and J. Townsend, "Silicon nitride microclips for the kinematic location of optic fibers in silicon V-shaped grooves," J. Micromech. Microeng., vol. 8, pp. 343-360, 1998.