Performance improvement of scaled-down top-contact OTFTs by two-step-deposition of pentacene

IEEE Electron Device Letters

Volumn 26, Issue 12, 2005, Pages 903-905

  Jin, Sung Hun ^a   Lee, Cheon An ^a   Jung, Keum Dong ^a   Shin, Hyungcheol ^a   Park, Byung Gook ^a   Lee, Jong Duk ^a  

^a Seoul National University   (South Korea)

Author keywords

Membrane shadow mask; Top contact pentacene thin film transistors (TFTs); Two step deposition (TSD)

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; ELECTRIC CONDUCTIVITY; GRAIN SIZE AND SHAPE; LEAKAGE CURRENTS; MEMBRANES; SEMICONDUCTOR DEVICE MANUFACTURE;

MEMBRANE SHADOW MASK; ORGANIC THIN FILM TRANSISTORS (TFTS); TOP CONTACT PENTACENE; TWO STEP DEPOSITION (TSD);

THIN FILM TRANSISTORS;

EID: 29244439023     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2005.859678     Document Type: Article

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