Analytical modeling and FEM simulations of single-stage microleverage mechanism

International Journal of Mechanical Sciences

Volumn 44, Issue 11, 2002, Pages 2217-2238

  Su, Susan Xiao Ping ^a   Yang, Henry S ^b  

^a Piconetics Inc   (United States)

^b APPLIED MATERIALS INC   (United States)

Author keywords

Compliant mechanisms; Force amplification; Microleverage mechanism; Resonant accelerometer; Single stage microlever

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; COMPUTER SOFTWARE; DEFORMATION; ELASTIC MODULI; FINITE ELEMENT METHOD; OPTIMIZATION;

MICROLEVERAGE MECHANISM;

MICROELECTROMECHANICAL DEVICES;

EID: 0036873858     PISSN: 00207403     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0020-7403(02)00162-5     Document Type: Article

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