Single-stage microleverage mechanism optimization in a resonant accelerometer

Structural and Multidisciplinary Optimization

Volumn 21, Issue 3, 2001, Pages 246-252

  Su, X P S ^a   Yang, H S ^b,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Kaiser Aluminum   (United States)

^c M/S 1158 ^*  (United States)

Author keywords

Compliant mechanisms; Force amplification; Microleverage mechanism; Resonant accelerometer; Single stage microlever

Indexed keywords

ACCELEROMETERS; FABRICATION; FORCE MEASUREMENT; MECHANICS; NUMERICAL ANALYSIS; OPTIMIZATION; SYSTEMS ANALYSIS;

COMPLIANCE-MATCH THEORY; COMPLIANT MECHANISMS; FORCE AMPLIFICATION; MICROLEVERAGE MECHANISM; RESONANCE ACCELEROMETER; SINGLE STAGE MICROLEVER;

MICROELECTROMECHANICAL DEVICES;

EID: 0035298143     PISSN: 1615147X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s001580050189     Document Type: Article

References (8)

1. Designing compliant mechanisms
2. MEMS simulation using SUGAR v0.5
3. Topological synthesis of compliant mechanisms using multi-criteria optimization
4. Nickel-filled HEXSIL thermally actuated tweezers
5. A passive, in situ micro strain gauge
6. Surface micromachined resonant accelerometer
7. Surface-micromachined resonant force sensor
8. An application of mechanical leverage to microactuation