Diamond film synthesis at low temperature

Diamond and Related Materials

Volumn 15, Issue 1, 2006, Pages 109-116

  Piazza, F ^a   Gonzalez J A ^b   Velazquez R ^a   De Jesus J ^a   Rosario, S A ^a   Morell, G ^a  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

^b UNIVERSITY OF PUERTO RICO   (Puerto Rico)

Author keywords

Diamond film; Hot filament CVD; Low temperature; Sulfur assisted CVD

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; GRAIN SIZE AND SHAPE; SULFUR; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

GRAIN SIZE; HOT FILAMENT CVD; LOW TEMPERATURES; SULFUR ASSISTED CVD;

DIAMOND FILMS;

EID: 29144477745     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.07.028     Document Type: Article

References (48)

1. S. Gupta, B.R. Weiner, and G. Morell J. Mater. Res. 18 2003 363 (and references therein)
2. I. Sakaguchi, M.N. Gamo, Y. Kikuchi, E. Yasu, H. Haneda, T. Suzuki, and T. Ando Phys. Rev., B 60 1999 R2139
3. R. Kalish, A. Reznik, C. Uzan-Saguy, and C. Cytermann Appl. Phys. Lett. 76 2000 757
4. D. Saada, J. Adler, and R. Kalish Appl. Phys. Lett. 77 2000 878
5. I. Schmidt, and C. Benndorf Diamond Relat. Mater. 10 2001 347
6. J.R. Petherbridge, P.W. May, S.R.J. Pearce, K.N. Rosser, and M.N.R. Ashold J. Appl. Phys. 89 2001 1484
7. A. Hiraki Appl. Surf. Sci. 162 2000 326
8. J. Lee, R.W. Collins, and R. Messier Appl. Phys. Lett. 70 1997 1527
9. C.F. Chen, S.H. Chen, and K.M. Lin Thin Solid Films 270 1995 205
10. Z. Ring, T. Mantei, S. Tlali, and H.E. Jackson Appl. Phys. Lett. 66 1995 3380
11. L. Dong, B. Ma, and G. Dong Diamond Relat. Mater. 11 2002 1697
12. T. Yoshitake, T. Hara, T. Fukugawa, L.Y. Zhu, M. Itakura, N. Kuwano, Y. Tomokiyo, and K. Nagayama J. Appl. Phys. 43 2004 L240
13. S. Gupta, B.R. Weiner, and G. Morell Appl. Phys. Lett. 83 2003 491
14. S. Gupta, A. Martínez, B.R. Weiner, and G. Morell Appl. Phys. Lett. 81 2002 283
15. S. Gupta, B.R. Weiner, and G. Morell Diamond Relat. Mater. 11 2002 799
16. F.A.M. Köck, J.M. Garguillo, R.J. Nemanich, S. Gupta, B.R. Weiner, and G. Morell Diamond Relat. Mater. 12 2003 474
17. S. Gupta, B.L. Weiss, B.R. Weiner, and G. Morell J. Appl. Phys. 89 2001 5671
18. G. Morell, W. Perez, E. Ching-Prado, and R.S. Katiyar Phys. Rev., B 53 1996 5388
19. G. Morell, O. Quinones, Y. Diaz, I.M. Vargas, B.R. Weiner, and R.S. Katiyar Diamond Relat. Mater. 7 1998 1029
20. B.D. Cullity Elements of X-ray Diffraction 1967 Addison-Wesley Reading, MA
21. P. Scherrer, and Nachr. Ges. Wiss. Goettingen Math.-Phys. Kl. 26 1918 98
22. L. Bergman, and R.J. Nemanich J. Appl. Phys. 78 1995 6709
23. Qi Hua Fan, A. Fernandez, E. Pereira, and J. Gracio Diamond Relat. Mater. 8 1999 645
24. S. Gupta, R.S. Katiyar, D.R. Gilbert, R.K. Singh, and G. Morell J. Appl. Phys. 88 2000 5695
25. G.K. Williamson, and W.H. Hall Acta Metall. 1 1953 22
26. M. Ohring The Materials Science of Thin Films 1992 Academic press
27. P.J. Gielisse M.A. Prelas G. Popovici L.K. Bigelow Handbook of Industrial Diamond and Diamond Films 1998 Marcel-Dekker, Inc.
28. J. Wagner, C. Wild, and P. Koidl Appl. Phys. Lett. 59 1991 779
29. F. Tuinstra, and J.L. Koenig J. Chem. Phys. 53 1970 1126
30. D. Beeman, J. Silverman, R. Lynds, and M.R. Anderson Phys. Rev., B 30 1984 870
31. T. Lopez-Rios, E. Sandre, S. Leclercq, and E. Sauvin Phys. Rev. Lett. 76 1996 4935
32. M. Zarrabian, Thèse de Doctorat, Université de Nantes, France, 1998.
33. A.C. Ferrari, and J. Robertson Phys. Rev. 63 2001 121405
34. A.J. Heeger, S. Kivelson, J.R. Schrieffer, and W.P. Su Rev. Mod. Phys. 60 1988 781
35. F. Piazza, G. Golanski, S. Schulze, and R. Relihan Appl. Phys. Lett. 82 2003 358
36. F. Piazza, S. Schulze, R. Relihan, and A. Golanski Diamond Relat. Mater. 12 2003 942
37. J.E. Dennis, and R.B. Schnabel Numerical Methods for Unconstrained Optimization and Non-linear Equations 1983 Prentice-Hall
38. R.C. Hyer, M. Green, and S.C. Sharma Phys. Rev., B 49 1994 14573
39. J. De Jesus, F. Piazza, G. Morell, Diamond Relat. Mater (submitted for publication).
40. R.J. Nemanich, J.T. Glass, G. Lucovsky, and R.E. Shroder J. Vac. Sci. Technol., A 6 1988 1783
41. R.E. Shroder, R.J. Nemanich, and J.T. Glass Phys. Rev., B 41 1990 3738
42. D.S. Knight, and W.B. White J. Mater. Res. 4 1989 385
43. J.W. Ager, and M.D. Drory Phys. Rev., B 48 1993 2601
44. R. Haubner, and D. Sommer Diamond Relat. Mater. 12 2003 298
45. R. Haubner Diamond Relat. Mater. 13 2004 648
46. D.S. Dandy Thin Solid Films 381 2001 1
47. H. Sternschulte, M. Schreck, B. Stritzer, A. Bergmaier, and G. Dollinger Diamond Relat. Mater. 12 2003 318
48. J.R. Petherbridge, P.W. May, G.M. Fuge, G.F. Robertson, K.N. Rosser, and M.N.R. Ashfold J. Appl. Phys. 91 2002 3605