Fabrication of microchannel arrays in borophosphosilicate glass

Journal of Materials Research

Volumn 20, Issue 3, 2005, Pages 759-764

  Callender, Claire L ^a   Ledderhof, Christopher J ^a   Dumais, Patrick ^a   Blanchetière, Chantal ^a   Noad, Julian P ^a  

^a Industry Canada   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DEPOSITION; OPTIMIZATION; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

BOROPHOSPHOSILICATE GLASS; MICROCHANNEL ARRAYS; MICROFLUIDICS;

FUSED SILICA;

EID: 29044450075     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2005.0102     Document Type: Article

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