A novel σ-δ pulsed digital oscillator (PDO) for MEMS

IEEE Sensors Journal

Volumn 5, Issue 6, 2005, Pages 1379-1388

  Domínguez, Manuel ^a,b   Pons Nin, Joan ^a,b   Ricart, Jordi ^b   Bermejo, Agustín ^b   Costa, Eduardo Figueras ^c,d  

^a IEEE   (Spain)

^b UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^d Microsystems and Silicon Technologies Department   (Spain)

Author keywords

Microelectromechanical systems (MEMS); Oscillator; Sigma delta ( )

Indexed keywords

OSCILLATION FREQUENCY; PULSED DIGITAL OSCILLATORS (PDO);

COMPUTER SIMULATION; DAMPING; DELTA SIGMA MODULATION; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES;

OSCILLATORS (ELECTRONIC);

EID: 29044438459     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.855601     Document Type: Article

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