Novel electrostatic repulsion forces in MEMS applications by nonvolatile charge injection

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 598-601

  Liu, Zengtaon ^a   Kim, Myongseob ^a   Shen, Nick ^a   Kan, Edwin C ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTRON BEAMS; ELECTRON TUNNELING; FORCE MEASUREMENT; LINEAR NETWORKS; MICROELECTROMECHANICAL DEVICES; MOS CAPACITORS; PROM; SYSTEMS ANALYSIS; THRESHOLD VOLTAGE;

ACTUATION FORCES; CAPACITOR NETWORK MODEL; ELECTRICALLY ERASABLE PROGRAMMABLE READ ONLY MEMORY; ELECTROSTATIC REPULSION FORCES; FLOATING GATE; HOT ELECTRON INJECTION; NONVOLATILE CHARGE INJECTION;

ELECTROSTATIC ACTUATORS;

EID: 0036120625     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Microdynamics
2. Electrostically balanced comb drive for controlled levitation
3. Electrostatic batch assembly of surface MEMS using ultrasonic triboelectricity
4. Fabrication of a micro turbine/bearing rig
5. Process and device characteristics of self-assembled metal nano-crystal EEPROM