Silicon membrane gyroscope with electrostatic actuation

IEE Colloquium (Digest)

Volumn , Issue 227, 1996, Pages

  Harris, A J ^a   Burdess, J S ^a   Cruickshank, J ^a   Wood, D ^a   Cooper, G ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRODES; ELECTROSTATICS; ETCHING; SEMICONDUCTING SILICON; VIBRATIONS (MECHANICAL);

ANISOTROPIC BULK ETCHING; SILICON MEMBRANE GYROSCOPES;

GYROSCOPES;

EID: 0030566362     PISSN: 09633308     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)