메뉴 건너뛰기




Volumn 20, Issue 3, 2005, Pages 680-687

Effect of solution pH on the accelerated cracking of nanoporous thin-film glasses

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; CRACK PROPAGATION; INORGANIC COMPOUNDS; NANOSTRUCTURED MATERIALS; ORGANIC COMPOUNDS; PERMITTIVITY; PH EFFECTS; STRESS CORROSION CRACKING; THIN FILMS; TRANSPORT PROPERTIES;

EID: 29044435187     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2005.0079     Document Type: Article
Times cited : (29)

References (47)
  • 2
    • 0346686074 scopus 로고    scopus 로고
    • Fracture of nanoporous thin-film glasses
    • E.P. Guyer and R.H. Dauskardt: Fracture of nanoporous thin-film glasses. Nature Mater. 3(1), 53 (2004).
    • (2004) Nature Mater. , vol.3 , Issue.1 , pp. 53
    • Guyer, E.P.1    Dauskardt, R.H.2
  • 4
    • 0031099165 scopus 로고    scopus 로고
    • Subcritical crack-growth behavior of borosilicate glass under cyclic loads: Evidence of a mechanical fatigue effect
    • S.J. Dill, S.J. Bennison, and R.H. Dauskardt: Subcritical crack-growth behavior of borosilicate glass under cyclic loads: Evidence of a mechanical fatigue effect. J. Am. Ceram. Soc. 80, 773 (1997).
    • (1997) J. Am. Ceram. Soc. , vol.80 , pp. 773
    • Dill, S.J.1    Bennison, S.J.2    Dauskardt, R.H.3
  • 6
    • 84977695915 scopus 로고
    • Influence of water vapor on crack propagation in soda-lime glass
    • S.M. Wiederhorn: Influence of water vapor on crack propagation in soda-lime glass. J. Am. Ceram. Soc. 50, 407 (1967).
    • (1967) J. Am. Ceram. Soc. , vol.50 , pp. 407
    • Wiederhorn, S.M.1
  • 7
    • 0014868714 scopus 로고
    • Stress corrosion and static fatigue of glass
    • S.M. Wiederhorn and L.H. Bolz: Stress corrosion and static fatigue of glass. J. Am. Ceram. Soc. 53, 543 (1970).
    • (1970) J. Am. Ceram. Soc. , vol.53 , pp. 543
    • Wiederhorn, S.M.1    Bolz, L.H.2
  • 10
    • 84987368318 scopus 로고
    • Effect of pressure on static fatigue of glass
    • S.M. Wiederhorn and H. Johnson: Effect of pressure on static fatigue of glass. J. Am. Ceram. Soc. 54, 585 (1971).
    • (1971) J. Am. Ceram. Soc. , vol.54 , pp. 585
    • Wiederhorn, S.M.1    Johnson, H.2
  • 11
    • 0027677897 scopus 로고
    • A chemical kinetics model for glass fracture
    • T.A. Michalske and B.C. Bunker: A chemical kinetics model for glass fracture. J. Am. Ceram. Soc. 76, 2613 (1993).
    • (1993) J. Am. Ceram. Soc. , vol.76 , pp. 2613
    • Michalske, T.A.1    Bunker, B.C.2
  • 12
    • 0023437980 scopus 로고
    • Steric effects in stress corrosion fracture of glass
    • T.A. Michalske and B.C. Bunker: Steric effects in stress corrosion fracture of glass. J. Am. Ceram. Soc. 70, 780 (1987).
    • (1987) J. Am. Ceram. Soc. , vol.70 , pp. 780
    • Michalske, T.A.1    Bunker, B.C.2
  • 13
    • 0021517155 scopus 로고
    • Slow fracture model based on strained silicate structures
    • T.A. Michalske and B.C. Bunker: Slow fracture model based on strained silicate structures. J. Appl. Phys. 56, 2686 (1984).
    • (1984) J. Appl. Phys. , vol.56 , pp. 2686
    • Michalske, T.A.1    Bunker, B.C.2
  • 14
    • 0020736675 scopus 로고
    • A molecular mechanism for stress corrosion in vitreous silica
    • T.A. Michalske and S.W. Freiman: A molecular mechanism for stress corrosion in vitreous silica. J. Am. Ceram. Soc. 66, 284 (1983).
    • (1983) J. Am. Ceram. Soc. , vol.66 , pp. 284
    • Michalske, T.A.1    Freiman, S.W.2
  • 15
    • 0019898001 scopus 로고
    • A molecular interpretation of stress corrosion in silica
    • T.A. Michalske and S.W. Freiman: A molecular interpretation of stress corrosion in silica. Nature 295, 511 (1982).
    • (1982) Nature , vol.295 , pp. 511
    • Michalske, T.A.1    Freiman, S.W.2
  • 16
    • 0039763168 scopus 로고
    • Environmental crack and craze growth phenomena in polymers
    • J.G. Williams and G.P. Marshall: Environmental crack and craze growth phenomena in polymers. Proc. R. Soc. London Ser. A 342, 55 (1975).
    • (1975) Proc. R. Soc. London Ser. A , vol.342 , pp. 55
    • Williams, J.G.1    Marshall, G.P.2
  • 17
    • 0020708196 scopus 로고
    • Slow stable crack-growth in high-density polyethylenes
    • M.K.V. Chan and J.G. Williams: Slow stable crack-growth in high-density polyethylenes. Polym. 24, 234 (1983).
    • (1983) Polym. , vol.24 , pp. 234
    • Chan, M.K.V.1    Williams, J.G.2
  • 19
    • 0036470469 scopus 로고    scopus 로고
    • Moisture-assisted subcritical debonding of a polymer/metal interface
    • S.Y. Kook and R.H. Dauskardt: Moisture-assisted subcritical debonding of a polymer/metal interface. J. Appl. Phys. 91, 1293 (2002).
    • (2002) J. Appl. Phys. , vol.91 , pp. 1293
    • Kook, S.Y.1    Dauskardt, R.H.2
  • 20
  • 21
    • 29044436783 scopus 로고    scopus 로고
    • Effect of aqueous solution chemistry on the accelerated cracking of lithographically patterned arrays of copper and nanoporous thin-films
    • edited by R.J. Carter, C.S. Hau-Riege, G.M. Kloster, T-M. Lu, and S.E. Schulz (Mater. Res. Soc. Symp. Proc., 812, Warrendale, PA)
    • E.P. Guyer and R.H. Dauskardt: Effect of aqueous solution chemistry on the accelerated cracking of lithographically patterned arrays of copper and nanoporous thin-films, in Materials Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2004, edited by R.J. Carter, C.S. Hau-Riege, G.M. Kloster, T-M. Lu, and S.E. Schulz (Mater. Res. Soc. Symp. Proc., 812, Warrendale, PA, 2004).
    • (2004) Materials Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2004
    • Guyer, E.P.1    Dauskardt, R.H.2
  • 22
    • 0031357479 scopus 로고    scopus 로고
    • Progressive debonding of multilayer interconnect structures
    • edited by J.J. Clement, R.R. Keller, K.S. Krisch, J.E. Sanchez, Jr., and Z. Suo. (Mater. Res. Soc. Symp. Proc., 473, Warrendale, PA)
    • M. Lane, R. Ware, S. Voss, Q. Ma, H. Fujimoto, and R.H. Dauskardt: Progressive debonding of multilayer interconnect structures, in Materials Reliability in Microelectronics VII Symposium, edited by J.J. Clement, R.R. Keller, K.S. Krisch, J.E. Sanchez, Jr., and Z. Suo. (Mater. Res. Soc. Symp. Proc., 473, Warrendale, PA, 1997).
    • (1997) Materials Reliability in Microelectronics VII Symposium
    • Lane, M.1    Ware, R.2    Voss, S.3    Ma, Q.4    Fujimoto, H.5    Dauskardt, R.H.6
  • 23
    • 0000434759 scopus 로고    scopus 로고
    • Stress-corrosion cracking of low-dielectric constant spin-on-glass thin films
    • R. Cook and E. Liniger: Stress-corrosion cracking of low-dielectric constant spin-on-glass thin films. J. Electrochem. Soc. 146(12), 4439 (1999).
    • (1999) J. Electrochem. Soc. , vol.146 , Issue.12 , pp. 4439
    • Cook, R.1    Liniger, E.2
  • 24
    • 0346308395 scopus 로고    scopus 로고
    • Environmental effects on subcritical delamination of dielectric and metal films from organosilicate glass (OSG) thin films
    • (Warrendale, PA)
    • Y. Lin, J. Vlassak, T. Tsui, and A. McKerrow: Environmental effects on subcritical delamination of dielectric and metal films from organosilicate glass (OSG) thin films. (Mater. Res. Soc. Symp. Proc., Warrendale, PA, 2003).
    • (2003) Mater. Res. Soc. Symp. Proc.
    • Lin, Y.1    Vlassak, J.2    Tsui, T.3    McKerrow, A.4
  • 25
    • 0015616877 scopus 로고
    • Effect of electrolyte pH on crack propagation in glass
    • S.M. Wiederhorn and H. Johnson: Effect of electrolyte pH on crack propagation in glass. J. Am. Ceram. Soc. 56, 192 (1973).
    • (1973) J. Am. Ceram. Soc. , vol.56 , pp. 192
    • Wiederhorn, S.M.1    Johnson, H.2
  • 26
    • 0032148208 scopus 로고    scopus 로고
    • Adhesion and debonding of multi-layer thin film structures
    • R.H. Dauskardt, M. Lane, Q. Ma, and N. Krishna: Adhesion and debonding of multi-layer thin film structures. Eng. Fract. Mech. 61, 141 (1998).
    • (1998) Eng. Fract. Mech. , vol.61 , pp. 141
    • Dauskardt, R.H.1    Lane, M.2    Ma, Q.3    Krishna, N.4
  • 28
    • 0034582833 scopus 로고    scopus 로고
    • Plasticity contributions to interface adhesion in thin-film interconnect structures
    • M. Lane, R.H. Dauskardt, A. Vainchtein, and H. Gao: Plasticity contributions to interface adhesion in thin-film interconnect structures. J. Mater. Res. 15, 2758 (2000).
    • (2000) J. Mater. Res. , vol.15 , pp. 2758
    • Lane, M.1    Dauskardt, R.H.2    Vainchtein, A.3    Gao, H.4
  • 30
    • 0015299997 scopus 로고
    • A chemical interpretation of static fatigue
    • S.M. Wiederhorn: A chemical interpretation of static fatigue. J. Am. Ceram. Soc. 55, 81 (1972).
    • (1972) J. Am. Ceram. Soc. , vol.55 , pp. 81
    • Wiederhorn, S.M.1
  • 32
    • 0007156734 scopus 로고
    • The mechanisms of chemical reaction between silicate glass and attacking agents
    • S.M. Budd: The mechanisms of chemical reaction between silicate glass and attacking agents. Phys. Chem. Glasses 2, 111 (1961).
    • (1961) Phys. Chem. Glasses , vol.2 , pp. 111
    • Budd, S.M.1
  • 33
    • 11244275662 scopus 로고    scopus 로고
    • Fracture of organosilicate glass thin films: Environmental effects
    • J.J. Vlassak, Y. Lin, and T.Y. Tsui: Fracture of organosilicate glass thin films: Environmental effects. Mater. Sci. Eng. A 391(1-2), 159 (2004).
    • (2004) Mater. Sci. Eng. A , vol.391 , Issue.1-2 , pp. 159
    • Vlassak, J.J.1    Lin, Y.2    Tsui, T.Y.3
  • 34
    • 0024877426 scopus 로고
    • Controls on silicate dissolution rates in neutral and basic pH solutions at 25C
    • P.V. Brady and J.V. Walther: Controls on silicate dissolution rates in neutral and basic pH solutions at 25C. Geochim. Cosmochim. Acta. 53, 2823 (1989).
    • (1989) Geochim. Cosmochim. Acta. , vol.53 , pp. 2823
    • Brady, P.V.1    Walther, J.V.2
  • 36
    • 0024877426 scopus 로고
    • Controls on silicate dissolution rates in neutral and basic pH solutions at 25-Degrees-C
    • P.V. Brady and J.V. Walther: Controls on silicate dissolution rates in neutral and basic pH solutions at 25-Degrees-C. Geochim. Cosmochim. Acta. 53, 2823 (1989).
    • (1989) Geochim. Cosmochim. Acta. , vol.53 , pp. 2823
    • Brady, P.V.1    Walther, J.V.2
  • 37
    • 0003516749 scopus 로고
    • 2nd ed. (W.H. Freeman and Co., New York, NY)
    • P.W. Atkins: Physical Chemistry, 2nd ed. (W.H. Freeman and Co., New York, NY, 1982).
    • (1982) Physical Chemistry
    • Atkins, P.W.1
  • 38
    • 33847090178 scopus 로고
    • Electrolyte theory - Improvements since Debye and Huckel
    • K.S. Pitzer: Electrolyte theory - Improvements since Debye and Huckel. Acc. Chem. Res. 10, 371 (1977).
    • (1977) Acc. Chem. Res. , vol.10 , pp. 371
    • Pitzer, K.S.1
  • 39
    • 0019049753 scopus 로고
    • Micromechanisms of crack growth in ceramics and glasses in corrosive environments
    • S.M. Wiederhorn, E.R.J. Fuller, and R. Thomson: Micromechanisms of crack growth in ceramics and glasses in corrosive environments. Metal Sci. 14, 450 (1980).
    • (1980) Metal Sci. , vol.14 , pp. 450
    • Wiederhorn, S.M.1    Fuller, E.R.J.2    Thomson, R.3
  • 41
    • 0030369013 scopus 로고    scopus 로고
    • Activity coefficients of aqueous solutions of NaOH and KOH in wide concentration and temperature ranges
    • J. Balej: Activity coefficients of aqueous solutions of NaOH and KOH in wide concentration and temperature ranges. Collection of Czechoslovack Chem. Comm. 61, 1549 (1996).
    • (1996) Collection of Czechoslovack Chem. Comm. , vol.61 , pp. 1549
    • Balej, J.1
  • 42
    • 0004146612 scopus 로고
    • (University Science Books, Mill Valley, CA)
    • P.A. Rock: Chemical Thermodynamics (University Science Books, Mill Valley, CA, 1983).
    • (1983) Chemical Thermodynamics
    • Rock, P.A.1
  • 43
    • 0000780045 scopus 로고
    • Interfacial forces and the fundamental nature of brittle cracks
    • B.R. Lawn: Interfacial forces and the fundamental nature of brittle cracks. Appl. Phys. Lett. 47, 809 (1985).
    • (1985) Appl. Phys. Lett. , vol.47 , pp. 809
    • Lawn, B.R.1
  • 44
    • 0024612373 scopus 로고
    • Effect of surface forces on subcritical crack-growth in glass
    • S.M. Wiederhorn and E.R. Fuller: Effect of surface forces on subcritical crack-growth in glass. J. Am. Ceram. Soc. 72, 248 (1989).
    • (1989) J. Am. Ceram. Soc. , vol.72 , pp. 248
    • Wiederhorn, S.M.1    Fuller, E.R.2
  • 45
    • 29044447901 scopus 로고    scopus 로고
    • Electrolytes in nanostructures
    • edited by M. Rosoff (Marcel Dekker, Inc., New York, NY)
    • K.Y. Chan: Electrolytes in nanostructures, in Nano-Surface Chemistry, edited by M. Rosoff (Marcel Dekker, Inc., New York, NY, 2002).
    • (2002) Nano-Surface Chemistry
    • Chan, K.Y.1
  • 47
    • 0033715453 scopus 로고    scopus 로고
    • Effects of slurry formulations on chemical-mechanical polishing of low-dielectric constant polysiloxanes: Hydrido-organo siloxane and methyl silsesquioxane
    • W-C. Chen and C-T. Yen: Effects of slurry formulations on chemical-mechanical polishing of low-dielectric constant polysiloxanes: hydrido-organo siloxane and methyl silsesquioxane. J. Vac. Sci. Technol. B 18, 201 (2000).
    • (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 201
    • Chen, W.-C.1    Yen, C.-T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.