Study of thermal diffusion between Al2O3 and Al thin films

Applied Surface Science

Volumn 151, Issue 1, 1999, Pages 139-147

  Garcia Mendez M ^a   Valles Villarreal, N ^a   Hirata Flores, G A ^b   Farias M H ^b,c  

^a CENTRO DE INVESTIGACIÓN CIENTÍFICA Y DE EDUCACIÓN SUPERIOR DE ENSENADA   (Mexico)

^b UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

^c CENTRO DE CIENCIAS DE LA MATERIA CONDENSADA   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM; DEPOSITION; EVAPORATION; HEAT TREATMENT; HIGH TEMPERATURE EFFECTS; INTERFACES (MATERIALS); METALLIC FILMS; SURFACE ROUGHNESS; THIN FILMS;

DEPTH PROFILING;

THERMAL DIFFUSION IN SOLIDS;

EID: 0033185321     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00133-6     Document Type: Article

References (17)

1. Ernst F. Mater. Sci. Eng. R 14:1995;97.
2. Brunner A.J., Hauert R. Phys. Stat. Sol. 125:1991;553.
3. Zalar A., Baretzky B., Dettenwanger F., Rühle M., Panjan P. Surf. Interface Anal. 26:1998;861.
4. Bernath S., Wagner T., Hofmann S., Rühle M. Surf. Sci. 400:1998;335.
5. Shimizu K., Furneax R.C., Thompson G.E., Wood G.C., Gotoh A., Kobayashi K. Oxid. Met. 35:1991;427.
6. O'Connor D.J., Wouters E.R., Denier van der Gon A.W., van der Veen J.F., Zagwijn P.M., Frenken J.W.M. Surf. Sci. 296:1993;131.
7. Contini V., Presilla C., Saccetti F., Tosto S. Surf. Sci. 276:1992;50.
8. Yuen H.C., Ralph B., Lee W.B. Scr. Metall. Mater. 29:1993;695.
9. L.E. Davis, N.C. MacDonald, P.W. Palmberg, G.E. Riach, R.E. Weber, Handbook of Auger Electron Spectroscopy, Physical Electronics Division, Perkin-Elmer, Eden Prairie, MN, 1978.
10. J. Crank, The Mathematics of Diffusion, Claredon Press, Oxford, 1975, pp. 1-414.
11. J.A. Thornton, J.E. Green, in: R.F. Bunsha (Ed.), Handbook of Deposition Technology for Films and Coatings, 2nd edn., Noyes Pub., 1994, p. 261.
12. G.P. Chambers, J. Fine, in: D. Briggs, M.P. Seah, Practical Surface Analysis, 2nd edn., Vol. 2, Wiley, 1992, p. 717.
13. Viefhaus H., Hennesen K., Lucas M., Müller-Lorenz E.M., Grabke H.J. Surf. Interface Anal. 21:1994;665.
14. Tapping R.L., Davidson R.D., Jackman T.E., Davies J.A. Surf. Interface Anal. 11:1998;441.
15. Park J.W., Pedraza A.J., Allen W.R. J. Vac. Sci. Technol. A. 14:1996;286.
16. Hoffman A., Paterson P.J.K. Surf. Sci. 352-354:1996;993.
17. Hall P.M., Morabito J.M. Surf. Sci. 54:1975;79.