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Volumn 33, Issue 4, 1996, Pages 33-38
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Semiconductor lithography for the next millennium
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRONICS PACKAGING;
EXCIMER LASERS;
INTEGRATED CIRCUIT LAYOUT;
INTEGRATED CIRCUIT MANUFACTURE;
LIGHT SOURCES;
MASKS;
OPTICAL SYSTEMS;
SILICON WAFERS;
SUBSTRATES;
SYNCHROTRON RADIATION;
TECHNOLOGY;
ULTRAVIOLET RADIATION;
DEEP SUBMICROMETER;
LITHOGRAPHIC TOOLS;
RAYLEIGH RULES;
SEMICONDUCTOR LITHOGRAPHY;
X RAY LITHOGRAPHY;
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EID: 0030126226
PISSN: 00189235
EISSN: None
Source Type: Journal
DOI: 10.1109/6.486632 Document Type: Article |
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Times cited : (35)
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References (3)
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