Why is it possible to detect doped regions of semiconductors in low voltage SEM: A review and update

Surface and Interface Analysis

Volumn 37, Issue 11, 2005, Pages 901-911

  El Gomati, M ^a   Zaggout, F ^a   Jayacody, H ^a   Tear, S ^a   Wilson, K ^a  

^a UNIVERSITY OF YORK   (United Kingdom)

Author keywords

Contrast; Dopants; LVSEM; Semiconductors

Indexed keywords

ELECTRON BEAMS; ELECTRON EMISSION; MOS DEVICES; SCANNING ELECTRON MICROSCOPY;

CONTRAST; DOPANTS; LVSEM;

SEMICONDUCTOR DEVICES;

EID: 28744448845     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.2108     Document Type: Conference Paper

References (23)

1. Vandervorst W, Clarysse T, Vanhellemont J, Romano-Rodriguez A. J. Vac. Sci. Technol. 1992; B 10(1): 449.
2. Heimbrook LA, Baiocchi FA, Bittner TC, Geva M, Luftman HS, Nakahara SJ. Vac. Sci. Technol. 1996; B 14(1): 202.
3. Basnar B, Golka E, Gornik E, Harasek S, Bertagnoli E, Schatzmayr M, Smoliner J. J. Vac. Sci. Technol. 2001; B 19(5): 1808.
4. Rau WD, Schwader P, Baumann FH, Hoppner W, Ourmazd A. Phys. Rev. Lett. 1998; 82(12): 2614.
5. Twitchett AC, Dunin-Borkowski RE, Midgley PA. Phys. Rev. lett. 2002; 88(23): 238 302.
6. Formanek P, Kittler M. J. Phys.: Condens. Matter 2004; 16: S193.
7. Chang THP, Nixon WC. Solid-State Electron. 1967; 10: 701.
8. Venables D, Jain H, Collins DC. J. Vac. Sci. Technol. 1998; B 16(1): 421.
9. Sealy CP, Castell MR, Wilshaw PR. J. Electron. Microsc. 2000; 49(2): 311.
10. Perovic DD, Castell MR, Howie A, Lavoie C, Tiedje T, Cole JSW. Ultramicroscopy 1995; 58: 104.
11. El-Gomati MM, Wells TCR. Appl. Phys. Lett. 2001; 79(18): 2931.
12. Jayakody GH. Electronic Contrast from Doped semiconductors, Ph.D Thesis, University of York, 2004.
13. Schonjahn C, Broom RF, Humphreys CJ, Howie A, Mentink SAM. App. Phys. Lett. 2003; 83(2): 293.
14. Zaggout F, El-Gomati MM. J. Appl. Phys. 2005; In preparation.
15. Rhoderick EH, Williams RH. Metal-Semiconductor Contacts (2nd edn). Clarendon press: Oxford, 1988; chapter. 5.
16. Sze S. Physics of Semiconductor Devices (2nd edn). J. Wiley & Sons: New York, 1980.
17. El-Gomati MM, Romanovsky V, Frank L, to be published.
18. Frank L, Mullerova I, El-Gomati MM. Ultramicroscopy 2000; 81: 99.
19. El-Gomati MM, Wells TRC, Mullerova I, Frank L, Jayakody H. IEEE Trans. on Electron Dev. 2004; 51(2): 288.
20. Graf D, Grundner M, Schulz R. J. Vac. Sci. Technol., A 1989; 7: 808.
21. Cerofolini GF, Bruna GLa, Meda L. Appl. Surf. Sci. 1996; 93: 255.
22. Card HC. Solid State Commun. 1975; 16: 87.
23. Mullerova I, El-Gomati MM, Frank L. Ultramicroscopy 2002; 93: 223.